TEL Tokyo Electron 381-500244-3內(nèi)存板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-500244-3 內(nèi)存板
產(chǎn)品應(yīng)用領(lǐng)域簡(jiǎn)述：
一、應(yīng)用領(lǐng)域
半導(dǎo)體制造設(shè)備主控系統(tǒng)
用于Tokyo Electron設(shè)備中的主控單元，協(xié)助處理控制命令和工藝程序。
數(shù)據(jù)緩存與臨時(shí)存儲(chǔ)
在設(shè)備運(yùn)行過(guò)程中臨時(shí)緩存圖像數(shù)據(jù)、工藝配方、傳感器信號(hào)等，支持實(shí)時(shí)響應(yīng)。
設(shè)備運(yùn)行配方管理
存儲(chǔ)和調(diào)用各類工藝配方（Recipe），保障快速、高效切換不同工藝流程。
報(bào)警與狀態(tài)日志記錄
設(shè)備運(yùn)行產(chǎn)生的狀態(tài)變化、報(bào)警信息可臨時(shí)保存在內(nèi)存中，供系統(tǒng)調(diào)用與維護(hù)分析。
與人機(jī)界面（HMI）的數(shù)據(jù)交互支持
協(xié)助HMI系統(tǒng)實(shí)時(shí)顯示設(shè)備狀態(tài)、輸入輸出操作結(jié)果。
二、典型應(yīng)用設(shè)備
TEL 蝕刻設(shè)備（如 Telius 系列）
TEL 化學(xué)氣相沉積設(shè)備（如 Unity 系列）
TEL 濕法清洗設(shè)備（如 Expedius 系列）
TEL 涂膠/顯影設(shè)備（如 Mark Vz 系列）
三、技術(shù)特點(diǎn)（概述）
工業(yè)級(jí)PCB內(nèi)存板，適應(yīng)高潔凈、高溫控制環(huán)境
與TEL主控模塊高速連接，執(zhí)行臨時(shí)數(shù)據(jù)處理任務(wù)
具備多通道存取能力，提升數(shù)據(jù)吞吐效率
可靠性高，支持長(zhǎng)時(shí)間不間斷運(yùn)行
英文資料：
TEL Tokyo Electron 381-500244-3 Memory Board
Product application field description:
1、 Application Fields
Main control system for semiconductor manufacturing equipment
Used as the main control unit in Tokyo Electron devices to assist in processing control commands and process programs.
Data caching and temporary storage
Temporarily cache image data, process formulas, sensor signals, etc. during device operation, supporting real-time response.
Equipment operation formula management
Store and call various process recipes to ensure fast and efficient switching between different process flows.
Alarm and status logging
The state changes and alarm information generated by device operation can be temporarily saved in memory for system call and maintenance analysis.
Data interaction support with human-machine interface (HMI)
Assist the HMI system in displaying device status and input/output operation results in real-time.
2、 Typical application devices
TEL etching equipment (such as Telius series)
TEL chemical vapor deposition equipment (such as Unity series)
TEL wet cleaning equipment (such as Expediaus series)
TEL coating/developing equipment (such as Mark Vz series)
3、 Technical Features (Overview)
Industrial grade PCB memory board, suitable for high cleanliness and high temperature control environment
Connect with TEL main control module at high speed to perform temporary data processing tasks
Capable of multi-channel access, improving data throughput efficiency
High reliability, supporting long-term uninterrupted operation
2.產(chǎn) 品 展 示
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