TEL Tokyo Electron 3281-000172-13輸入/輸出接口 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3281-000172-13 輸入/輸出接口模塊 — 產(chǎn)品應(yīng)用領(lǐng)域
該模塊是Tokyo Electron（TEL）用于半導(dǎo)體制造設(shè)備中的一種關(guān)鍵電子組件，主要負(fù)責(zé)控制系統(tǒng)與現(xiàn)場設(shè)備之間的輸入與輸出信號交互。其典型應(yīng)用領(lǐng)域包括以下幾方面：
半導(dǎo)體制造設(shè)備控制系統(tǒng)
用于各種半導(dǎo)體設(shè)備，如刻蝕機(jī)、CVD（化學(xué)氣相沉積）、PVD（物理氣相沉積）、清洗機(jī)和擴(kuò)散爐中，實(shí)現(xiàn)對工藝流程中各類傳感器、執(zhí)行器、電磁閥等部件的數(shù)字/模擬信號輸入輸出。設(shè)備內(nèi)部信號集成接口
作為主控制板和外圍功能模塊（如真空泵控制、電源監(jiān)控、運(yùn)動(dòng)控制系統(tǒng)）之間的數(shù)據(jù)通道，實(shí)現(xiàn)穩(wěn)定快速的數(shù)據(jù)通信。自動(dòng)化系統(tǒng)中的I/O控制
應(yīng)用于TEL設(shè)備自動(dòng)化控制系統(tǒng)中，如真空艙體開關(guān)控制、氣體流量調(diào)節(jié)、電源狀態(tài)監(jiān)控等場景。設(shè)備狀態(tài)監(jiān)測與遠(yuǎn)程診斷
支持輸入/輸出狀態(tài)采集，配合TEL上位機(jī)診斷系統(tǒng)用于故障檢測和預(yù)防性維護(hù)。晶圓搬運(yùn)與處理系統(tǒng)
可用于控制晶圓搬運(yùn)裝置、對準(zhǔn)系統(tǒng)或傳送系統(tǒng)，實(shí)現(xiàn)信號控制與位置確認(rèn)反饋。潔凈室設(shè)備接口擴(kuò)展
適用于位于潔凈環(huán)境中的模塊化生產(chǎn)設(shè)備，通過該接口模塊實(shí)現(xiàn)設(shè)備間模塊通信、環(huán)境參數(shù)采集及信號同步。
英文資料：
Tokyo Electron 3281-000172-13 Input/Output Interface Module - Product Application Fields
This module is a key electronic component used by Tokyo Electron (TEL) in semiconductor manufacturing equipment, mainly responsible for the input and output signal interaction between the control system and field devices. Its typical application areas include the following:
Semiconductor manufacturing equipment control system
Used in various semiconductor devices, such as etching machines, CVD (chemical vapor deposition), PVD (physical vapor deposition), cleaning machines, and diffusion furnaces, to achieve digital/analog signal input and output of various sensors, actuators, solenoid valves, and other components in the process flow.
Internal signal integration interface of the device
As a data channel between the main control board and peripheral functional modules (such as vacuum pump control, power monitoring, motion control system), it achieves stable and fast data communication.
I/O Control in Automation Systems
Applied in TEL equipment automation control systems, such as vacuum chamber switch control, gas flow regulation, power status monitoring, and other scenarios.
Equipment status monitoring and remote diagnosis
Support input/output status collection, in conjunction with TEL upper computer diagnostic system for fault detection and preventive maintenance.
Wafer Handling and Processing System
Can be used to control wafer handling devices, alignment systems, or conveyor systems, achieving signal control and position confirmation feedback.
Expansion of cleanroom equipment interfaces
Suitable for modular production equipment located in clean environments, this interface module enables inter device module communication, environmental parameter acquisition, and signal synchronization.
2.產(chǎn) 品 展 示
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