TEL Tokyo Electron 381-640600-1限制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-640600-1 限制板
產(chǎn)品類別：限制板（Limiter Board）
制造商：Tokyo Electron (TEL)
型號：381-640600-1
一、主要功能
信號保護(hù)：限制電壓、電流或噪聲，防止電路損壞。
信號調(diào)節(jié)：維持通信或控制信號在安全范圍內(nèi)。
靜電抑制：防止靜電放電（ESD）影響后端電子模塊。
模塊隔離：起到信號緩沖或電氣隔離作用，減少干擾。
二、典型應(yīng)用領(lǐng)域
半導(dǎo)體設(shè)備中的電路保護(hù)
常用于 CVD、Etch、PVD、清洗系統(tǒng)等內(nèi)部模塊之間的信號過渡保護(hù)。
晶圓處理系統(tǒng)
在晶圓搬運、加熱、冷卻或真空腔體接口中，限制突波信號。
RF/高頻電源系統(tǒng)
在射頻電源輸出至等離子腔體的通道上，用于保護(hù)射頻鏈路。
真空設(shè)備的控制接口
防止控制信號因電源波動或外部干擾造成設(shè)備誤動作。
光刻/顯影系統(tǒng)接口模塊
在光刻機(jī)或顯影系統(tǒng)中連接執(zhí)行器與控制板，限制異常信號影響。
英文資料：
TEL Tokyo Electron 381-64060-1 restriction board
Product Category: Limiter Board
Manufacturer: Tokyo Electron (TEL)
Model: 381-64060-1
1、 Main functions
Signal protection: Limit voltage, current, or noise to prevent circuit damage.
Signal conditioning: Maintaining communication or control signals within a safe range.
Static electricity suppression: prevents electrostatic discharge (ESD) from affecting the backend electronic module.
Module isolation: It serves as a signal buffer or electrical isolation to reduce interference.
2、 Typical application areas
Circuit protection in semiconductor equipment
Commonly used for signal transition protection between internal modules such as CVD, Etch, PVD, and cleaning systems.
Wafer processing system
Limit surge signals in wafer handling, heating, cooling, or vacuum chamber interfaces.
RF/High Frequency Power Supply System
Used to protect the RF link on the channel from the RF power output to the plasma chamber.
Control interface of vacuum equipment
Prevent equipment misoperation caused by power fluctuations or external interference in control signals.
Lithography/development system interface module
Connect actuators and control boards in lithography machines or development systems to limit the impact of abnormal signals.
2.產(chǎn) 品 展 示
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