Tokyo Electron CS1B85-372049-W1電機沖擊模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) CS1B85-372049-W1 電機沖擊模塊 — 產(chǎn)品應用領(lǐng)域詳解
1. 半導體制造設備中的晶圓傳輸系統(tǒng)
關(guān)鍵作用：該模塊在晶圓傳輸過程中，負責調(diào)節(jié)電機啟動和停止時的沖擊力度，確保晶圓平穩(wěn)移動。
應用價值：防止傳輸中因沖擊或震動導致的晶圓位移、破損或位置偏差，保障晶圓的完整性和后續(xù)工藝的穩(wěn)定性。
典型場景：晶圓搬運機器人、傳送帶啟動/停止控制、輸送機構(gòu)的減震優(yōu)化等。
2. 自動化機械運動控制
動態(tài)調(diào)節(jié)：該模塊通過控制電機沖擊，優(yōu)化機械臂或輸送系統(tǒng)的啟動與停止過程。
效果提升：有效降低機械系統(tǒng)的震動和沖擊，提升設備的運行平穩(wěn)性與重復定位精度。
應用示例：自動化裝載機、精密機械手臂、電機驅(qū)動的輸送裝置等。
3. 設備振動抑制與性能優(yōu)化
振動緩沖：通過精確控制電機沖擊力，減少機械沖擊帶來的振動，保護設備內(nèi)部敏感部件。
延長壽命：有效避免因沖擊頻繁造成的機械疲勞和損傷，延長設備使用壽命。
維護便利：降低故障率，減少維修頻次和停機時間，提升生產(chǎn)線稼動率。
4. 高精度定位系統(tǒng)支持
動作平穩(wěn)：在晶圓裝載、卸載及搬運環(huán)節(jié)，保證動作柔和穩(wěn)定，避免定位誤差。
工藝保障：穩(wěn)定的定位支持高精度工藝執(zhí)行，提升產(chǎn)品良率。
應用環(huán)境：微細加工設備、光刻機、刻蝕設備等需要高精度機械定位的場合。
英文資料：
Tokyo Electron (TEL) CS1B85-372049-W1 Motor Shock Module - Product Application Field Detailed Explanation
1. Wafer transfer system in semiconductor manufacturing equipment
Key role: This module is responsible for adjusting the impact force during the start and stop of the motor during wafer transfer, ensuring smooth movement of the wafer.
Application value: To prevent wafer displacement, damage, or positional deviation caused by impact or vibration during transmission, ensuring the integrity of the wafer and the stability of subsequent processes.
Typical scenarios: wafer handling robots, conveyor belt start/stop control, shock absorption optimization of conveying mechanisms, etc.
2. Automated mechanical motion control
Dynamic adjustment: This module optimizes the start and stop process of the robotic arm or conveyor system by controlling the motor impact.
Effect improvement: Effectively reduce the vibration and impact of the mechanical system, improve the smooth operation and repeated positioning accuracy of the equipment.
Application examples: Automated loaders, precision robotic arms, motor-driven conveyors, etc.
3. Equipment vibration suppression and performance optimization
Vibration buffering: By precisely controlling the impact force of the motor, the vibration caused by mechanical impact is reduced, and sensitive components inside the equipment are protected.
Extend lifespan: Effectively avoid mechanical fatigue and damage caused by frequent impacts, and extend the service life of equipment.
Easy maintenance: reduce failure rate, minimize maintenance frequency and downtime, and improve production line utilization rate.
4. High precision positioning system support
Smooth operation: Ensure smooth and stable operation during wafer loading, unloading, and handling to avoid positioning errors.
Process assurance: Stable positioning supports high-precision process execution, improving product yield.
Application environment: In situations where high-precision mechanical positioning is required, such as microfabrication equipment, lithography machines, etching equipment, etc.
2.產(chǎn) 品 展 示
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| 60-500455-006 | 6DD1660-0BA0 | NDSO04 |
| 6001756-05 | 6DD1660-0AJ1 | NDSI01 |
| 6001756-03 | 6SC6500-0AA02 | NAMM02 |
| 6001755-02 | 6SC6190-OFB00 | NDS001 |
| 565-5-5-O-B | 6SC9830-0BA02 | NASM02 |
| 565-5-5-O-A-E | 6SC6110-0GA00 | INMMP11 |
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