Tokyo Electron MR-MC01-S100控制器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron MR-MC01-S100 控制器模塊
（Controller Module）
產(chǎn)品功能簡(jiǎn)介：
MR-MC01-S100 控制器模塊是 TEL（Tokyo Electron）設(shè)備中專用于高精度運(yùn)動(dòng)控制或自動(dòng)化流程控制的核心部件。該模塊通常集成微處理器、I/O 控制接口、通信接口以及電機(jī)控制邏輯，是實(shí)現(xiàn)設(shè)備精密動(dòng)作執(zhí)行的控制核心。
主要功能包括：
控制步進(jìn)電機(jī)或伺服電機(jī)的運(yùn)行與定位
實(shí)現(xiàn)多軸聯(lián)動(dòng)、速度控制、加減速曲線生成
接收來(lái)自上位系統(tǒng)的動(dòng)作指令，進(jìn)行邏輯處理與反饋
支持傳感器輸入與限位檢測(cè)，保障設(shè)備安全運(yùn)行
提供與主控系統(tǒng)或人機(jī)界面的通信能力（如 RS-232/485、Ethernet、CAN 等）
主要應(yīng)用領(lǐng)域：
1. 晶圓搬運(yùn)與定位系統(tǒng)控制
管理 EFEM、Transfer Module、Aligner 等子系統(tǒng)中搬運(yùn)臂、對(duì)位平臺(tái)等部件的精準(zhǔn)動(dòng)作
執(zhí)行晶圓從 FOUP → Load Port → 工藝腔體的搬運(yùn)路徑邏輯
2. 多軸電機(jī)控制
控制多個(gè)執(zhí)行軸（X、Y、Z 或 θ 軸）協(xié)同運(yùn)動(dòng)，實(shí)現(xiàn)精準(zhǔn)機(jī)械結(jié)構(gòu)控制
可設(shè)定參數(shù)如速度、加速度、目標(biāo)位置、回零等
3. 真空系統(tǒng)或氣體系統(tǒng)部件控制
控制與真空閥、氣體閥、電磁機(jī)構(gòu)聯(lián)動(dòng)動(dòng)作，實(shí)現(xiàn)工藝聯(lián)鎖邏輯
在處理過(guò)程中精準(zhǔn)控制時(shí)間、順序和動(dòng)作幅度
4. 工藝流程邏輯控制
執(zhí)行步進(jìn)式的加工流程（如預(yù)熱、加壓、等離子激活等）中的動(dòng)作協(xié)調(diào)
管理執(zhí)行器、感測(cè)元件的啟停與狀態(tài)反饋
英文資料：
TEL Tokyo Electron MR-MC01-S100 Controller Module
（Controller Module）
Product Function Introduction:
The MR-MC01-S100 controller module is a core component specifically designed for high-precision motion control or automated process control in TEL (Tokyo Electron) equipment. This module typically integrates a microprocessor, I/O control interface, communication interface, and motor control logic, and is the control core that enables precise execution of equipment actions.
The main functions include:
Control the operation and positioning of stepper motors or servo motors
Realize multi axis linkage, speed control, and acceleration/deceleration curve generation
Receive action instructions from the upper system, perform logical processing and feedback
Support sensor input and limit detection to ensure safe operation of equipment
Provide communication capabilities with the main control system or human-machine interface (such as RS-232/485, Ethernet, CAN, etc.)
Main application areas:
1. Control of wafer handling and positioning system
Manage precise movements of handling arms, alignment platforms, and other components in subsystems such as EFEM, Transfer Module, and Aligner
Execute the logic of the wafer transport path from FOUP → Load Port → Process Chamber
2. Multi axis motor control
Control the coordinated motion of multiple execution axes (X, Y, Z, or θ axis) to achieve precise mechanical structure control
Parameters such as speed, acceleration, target position, zeroing, etc. can be set
3. Control of components in vacuum or gas systems
Control the linkage of vacuum valves, gas valves, and electromagnetic mechanisms to achieve process interlocking logic
Accurately control time, sequence, and action amplitude during the processing
4. Logical control of process flow
Coordinate actions in step-by-step machining processes such as preheating, pressurization, plasma activation, etc
Manage the start stop and status feedback of actuators and sensing components
2.產(chǎn) 品 展 示
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