Tokyo Electron 381-600090-1印刷電路板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-600090-1 印刷電路板
（Printed Circuit Board）
產品概述：
該 PCB 是 Tokyo Electron（TEL）半導體設備中的專用功能電路板，用于設備內部的信號傳輸、控制邏輯實現與系統接口擴展。作為一款中樞性電子部件，它通常承擔以下角色：
驅動信號處理與分配
執(zhí)行設備子系統控制邏輯
管理傳感器輸入、執(zhí)行機構輸出
與主控系統或上位板卡通信
功能特性：
集成數字與模擬電路，支持多種信號類型
具備多通道輸入輸出（I/O）功能
電路中可能包含處理器、驅動芯片、隔離電路和狀態(tài)指示元件
與其他 PCB 通過背板或連接器組網協作
支持模塊熱插拔與維護替換
主要應用領域：
1. 設備控制與子系統聯動
用于控制 TEL 設備中的子功能模塊，如：
晶圓搬運系統（Load Port、Transfer Arm）
真空泵與閥門控制
對位平臺或工藝腔體輔助設備
2. 信號路由與采集處理
采集傳感器信號（溫度、氣壓、位置等）
向執(zhí)行器（電磁閥、電機、加熱元件）輸出控制信號
3. 工藝參數監(jiān)測與數據采集
實現關鍵參數（如加熱溫度、真空狀態(tài)）監(jiān)控與反饋
與主控系統協同執(zhí)行閉環(huán)控制策略
英文資料：
TEL Tokyo Electron 381-600090-1 Printed Circuit Board
（Printed Circuit Board）
Product Overview:
This PCB is a specialized functional circuit board in Tokyo Electron (TEL) semiconductor equipment, used for internal signal transmission, control logic implementation, and system interface expansion. As a central electronic component, it typically plays the following roles:
Drive signal processing and allocation
Execute device subsystem control logic
Manage sensor inputs and actuator outputs
Communicate with the main control system or upper board
Functional features:
Integrated digital and analog circuits, supporting multiple signal types
Capable of multi-channel input/output (I/O) function
The circuit may contain processors, driver chips, isolation circuits, and status indicator components
Collaborate with other PCBs through backplane or connector networking
Support module hot plugging and maintenance replacement
Main application areas:
1. Equipment control and subsystem linkage
Used to control sub functional modules in TEL devices, such as:
Wafer Handling System (Load Port, Transfer Arm)
Vacuum pump and valve control
Alignment platform or process chamber auxiliary equipment
2. Signal routing and acquisition processing
Collect sensor signals (temperature, air pressure, position, etc.)
Output control signals to actuators (solenoid valves, motors, heating elements)
3. Process parameter monitoring and data collection
Implement monitoring and feedback of key parameters such as heating temperature and vacuum status
Collaborate with the main control system to execute closed-loop control strategies
2.產 品 展 示
3.其他產品
IS400JPDHG1ABB IS410JPDHG1A軸速度反饋傳感器
4.其他英文產品
Asea EB0524B01 driver input power board
ABB UN1024c-P Remote Terminal Module
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| 710-652010-20 | 8055-SCP-655R | 531X310SNDAEG1 |
