Tokyo Electron 1181-000571-13控制PCB卡 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱：
TEL Tokyo Electron 1181-000571-13 控制 PCB 卡
（Control PCB Card）
產(chǎn)品定義與功能：
該控制 PCB 卡是 TEL（Tokyo Electron）設(shè)備中的核心電子控制部件之一，作為子系統(tǒng)或設(shè)備單元的本地控制核心，具備以下功能：
執(zhí)行特定子模塊（如搬運系統(tǒng)、真空控制、加熱單元等）的控制邏輯
處理來自主控系統(tǒng)或傳感器的輸入信號，并輸出控制指令
實現(xiàn)設(shè)備狀態(tài)監(jiān)控、動作指令執(zhí)行、報警聯(lián)鎖等功能
通常集成多種通信接口和 I/O 端口，支持設(shè)備內(nèi)部模塊化互聯(lián)
可能包含嵌入式控制器、驅(qū)動芯片、數(shù)據(jù)緩沖與安全保護電路
主要應(yīng)用領(lǐng)域：
1. 晶圓處理模塊控制
控制晶圓傳輸臂、對位平臺、升降機構(gòu)等運動部件
接收來自上位控制系統(tǒng)的動作序列指令，并實現(xiàn)本地邏輯處理
2. 真空與氣體處理系統(tǒng)
用于管理腔體內(nèi)的真空泵、閥門、氣體流量控制器（MFC）等組件
對環(huán)境壓力、氣體比例等進行閉環(huán)控制
3. 本地設(shè)備狀態(tài)監(jiān)測與保護
實時采集溫度、電流、電壓、位置、門鎖等信號狀態(tài)
觸發(fā)設(shè)備安全保護動作，如斷電、急停、聯(lián)鎖響應(yīng)
4. 模塊化控制系統(tǒng)集成
在大型系統(tǒng)中作為分布式控制單元（Distributed Control Unit, DCU）工作
與主控板（Main Controller）通過串口或總線方式通訊協(xié)同運行
英文資料：
Product Name:
TEL Tokyo Electron 1181-000571-13 Control PCB Card
（Control PCB Card）
Product definition and functionality:
This control PCB card is one of the core electronic control components in TEL (Tokyo Electron) equipment, serving as the local control core for subsystems or equipment units, and has the following functions:
Execute control logic for specific submodules (such as handling systems, vacuum control, heating units, etc.)
Process input signals from the main control system or sensors and output control commands
Implement functions such as equipment status monitoring, action command execution, alarm interlocking, etc
Usually integrated with multiple communication interfaces and I/O ports, supporting modular interconnection within devices
May include embedded controllers, driver chips, data buffering, and security protection circuits
Main application areas:
1. Control of wafer processing module
Control moving parts such as wafer transfer arm, alignment platform, lifting mechanism, etc
Receive action sequence instructions from the upper control system and implement local logic processing
2. Vacuum and gas processing systems
Used to manage components such as vacuum pumps, valves, and gas flow controllers (MFCs) inside the chamber
Closed loop control of environmental pressure, gas ratio, etc
3. Local device status monitoring and protection
Real time collection of temperature, current, voltage, position, door lock and other signal status
Trigger device safety protection actions, such as power outage, emergency stop, interlock response
4. Modular control system integration
Working as a Distributed Control Unit (DCU) in large-scale systems
Collaborate with the Main Controller through serial or bus communication to operate in synergy
2.產(chǎn) 品 展 示
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