Tokyo Electron 1981-604035-11控制主板卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1981-604035-11 控制主板卡件
（Control Main Board / Control PCB Assembly）
產(chǎn)品功能簡介：
該卡件是 Tokyo Electron 半導(dǎo)體設(shè)備中用于設(shè)備核心控制系統(tǒng)的主控板（Main Control Board），其作用類似于工業(yè)控制系統(tǒng)中的“中央處理單元”，主要功能包括：
作為設(shè)備中樞控制單元，執(zhí)行主控制邏輯
管理各子模塊的通信、數(shù)據(jù)交互與動作協(xié)調(diào)
采集傳感器信號，分析處理后發(fā)出控制命令
控制執(zhí)行機(jī)構(gòu)（如電機(jī)、閥門、氣缸、加熱器等）進(jìn)行精密操作
與上位系統(tǒng)（如人機(jī)界面 HMI、MES 系統(tǒng)）通信并同步狀態(tài)數(shù)據(jù)
主要應(yīng)用領(lǐng)域：
1. 半導(dǎo)體制造工藝控制
用于 TEL 的 CVD、Etcher、PVD 等設(shè)備中，管理關(guān)鍵工藝參數(shù)（溫度、壓力、時間、氣體流量等）
精確控制加工流程步驟，確保產(chǎn)品一致性和良率
2. 晶圓搬運與自動化控制系統(tǒng)
管理晶圓在 EFEM、Load Port、Transfer 模塊等中的位置移動與流程控制
控制對位、搬運、裝載、卸載、升降等復(fù)雜動作邏輯
3. 設(shè)備安全聯(lián)鎖與故障處理
實時監(jiān)測設(shè)備運行狀態(tài)，執(zhí)行緊急停機(jī)、故障報警、錯誤日志記錄等保護(hù)功能
支持 ESD、過流、過壓等異常狀態(tài)響應(yīng)處理
4. 通信與接口控制
搭載工業(yè)通信接口（如 RS-232/485、Ethernet、CAN）與其它控制板卡及工廠網(wǎng)絡(luò)對接
管理與人機(jī)界面（HMI）及上位軟件的命令傳輸與狀態(tài)反饋
英文資料：
TEL Tokyo Electron 1981-604035-11 Control Motherboard Card
（Control Main Board / Control PCB Assembly）
Product Function Introduction:
This card is the main control board used in the core control system of Tokyo Electron semiconductor equipment. Its function is similar to the "central processing unit" in industrial control systems, and its main functions include:
As the central control unit of the device, execute the main control logic
Manage the communication, data exchange, and action coordination of each submodule
Collect sensor signals, analyze and process them, and issue control commands
Control actuators (such as motors, valves, cylinders, heaters, etc.) for precise operation
Communicate with upper level systems (such as human-machine interface HMI, MES system) and synchronize status data
Main application areas:
1. Semiconductor manufacturing process control
Used in TEL CVD, Etcher, PVD and other equipment to manage key process parameters (temperature, pressure, time, gas flow rate, etc.)
Accurately control the processing steps to ensure product consistency and yield
2. Wafer handling and automation control system
Manage the position movement and process control of wafers in EFEM, Load Port, Transfer module, etc
Control complex action logic such as alignment, handling, loading, unloading, lifting, etc
3. Equipment safety interlocking and fault handling
Real time monitoring of equipment operation status, execution of emergency shutdown, fault alarm, error log recording and other protective functions
Support response handling for abnormal states such as ESD, overcurrent, overvoltage, etc
4. Communication and Interface Control
Equipped with industrial communication interfaces (such as RS-232/485, Ethernet, CAN) to interface with other control boards and factory networks
Command transmission and status feedback of management and human-machine interface (HMI) and upper software
2.產(chǎn) 品 展 示
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| 750-P5-G1-D5-HI-A20-R | 531X100CCHAPM1 | 8030-DOM-221 |
| 750-P1-G1-S1-HI-A20-R-T-H | 531X111PSHAPG2 | 8030-DOM-101 |
| 750-P1-G1-S1-HI-A20-R | 531X111PSHATG3 | 8030-HOM-251 |
| 750-P1-G1-D1-HI-A20-R | 531X118CCAACG1 | 8030-HOM-241 |
| 745-W3-P5-G5-HI-R-E | 531X111PSHAWG3 | 8030-HOM-231 |
| 745-W3-P5-G5-HI-R | 8030-RIM-131 | 8030-HOM-222 |
| 745-W3-P5-G5-HI-E | 8030-RIM-127 | 8030-HOM-221 |
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