Tokyo Electron 3D81-000063-V5電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D81-000063-V5 電路板
（Printed Circuit Board）
產(chǎn)品功能簡介：
該電路板是 Tokyo Electron（TEL）半導體制造設備中的一款專用功能板，承擔設備內(nèi)部關(guān)鍵的信號處理、邏輯控制和接口連接任務。其功能特點可能包括：
控制系統(tǒng)子模塊之間的信號傳輸與接口管理
連接傳感器、驅(qū)動器、執(zhí)行機構(gòu)，實現(xiàn)自動控制
對來自主控制器或 PLC 的指令進行分配、執(zhí)行
支持設備狀態(tài)反饋與運行參數(shù)采集
主要應用領(lǐng)域：
1. 設備控制系統(tǒng)內(nèi)部核心部件
用于設備的主控系統(tǒng)或子系統(tǒng)內(nèi)，協(xié)調(diào)執(zhí)行機構(gòu)、I/O 模塊與主控器之間的信號交互
實現(xiàn)動作流程的邏輯控制，例如腔體開合、晶圓移動、真空控制等
2. 晶圓搬運與定位模塊
管理與電機控制、電磁閥、傳感器等組件的連接
確保晶圓搬運過程中的精度和可靠性
3. 真空處理系統(tǒng)
可能用于真空腔體內(nèi)氣體控制、壓力監(jiān)測或閥門驅(qū)動等子系統(tǒng)中
適配質(zhì)量流量控制器（MFC）、真空傳感器等設備
4. 人機界面與通信連接
擔任人機交互面板與主系統(tǒng)間的數(shù)據(jù)傳遞媒介
可能包含通信接口（如 RS232、CAN、Ethernet）用于遠程監(jiān)控或系統(tǒng)集成
英文資料：
TEL Tokyo Electron 3D81-000063-V5 Circuit Board
（Printed Circuit Board）
Product Function Introduction:
This circuit board is a specialized functional board in Tokyo Electron (TEL) semiconductor manufacturing equipment, responsible for critical signal processing, logic control, and interface connection tasks within the equipment. Its functional features may include:
Signal transmission and interface management between control system submodules
Connect sensors, drivers, and actuators to achieve automatic control
Allocate and execute instructions from the main controller or PLC
Support device status feedback and operation parameter collection
Main application areas:
1. Core components inside the equipment control system
Used within the main control system or subsystem of a device to coordinate signal interaction between the executing mechanism, I/O modules, and the main controller
Implement logical control of action processes, such as chamber opening and closing, wafer movement, vacuum control, etc
2. Wafer handling and positioning module
Manage the connection of components such as motor control, solenoid valves, sensors, etc
Ensure accuracy and reliability during wafer handling
3. Vacuum processing system
May be used in subsystems such as gas control, pressure monitoring, or valve actuation within vacuum chambers
Adapt to devices such as Mass Flow Controllers (MFCs) and vacuum sensors
4. Human machine interface and communication connection
Serve as the data transmission medium between the human-computer interaction panel and the main system
May include communication interfaces (such as RS232, CAN, Ethernet) for remote monitoring or system integration
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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| 750-P5-G5-S5-HI-A20-R | 8020-SCP-522 | 8030-HQM-471 |
| 750-P5-G5-S5-HI-A20-G | 8020-SCP-521 | 8030-HOM-271 |
| 750-P5-G5-S1-HI-A20-R | 8020-SCP-452 | 8030-HOM-261 |
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