Tokyo Electron 3M81-005973-14輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M81-005973-14 輸入輸出模塊簡(jiǎn)介
一、基本信息
產(chǎn)品型號(hào)： 3M81-005973-14
名稱定義： 輸入輸出模塊（I/O Module）或稱為 SFLUX-AMP PCB（信號(hào)放大板）
制造商： Tokyo Electron Ltd.（TEL）
適用設(shè)備： 半導(dǎo)體工藝設(shè)備，如CVD、Etcher、Coater/Developer等平臺(tái)控制系統(tǒng)中
二、功能與作用
信號(hào)輸入輸出接口
接收和輸出數(shù)字或模擬信號(hào)，用于與現(xiàn)場(chǎng)設(shè)備（如傳感器、執(zhí)行器、電磁閥等）建立通信通道。信號(hào)放大與整形
集成有信號(hào)放大電路（SFLUX-AMP），可對(duì)輸入信號(hào)進(jìn)行增強(qiáng)或?yàn)V波，提升信號(hào)質(zhì)量與穩(wěn)定性。電氣隔離功能
可能具備隔離電路設(shè)計(jì)，有助于抑制電磁干擾，保護(hù)上位控制系統(tǒng)的穩(wěn)定運(yùn)行。模塊化集成
可與CPU模塊、繼電器控制板、電源模塊等組合組成完整的控制系統(tǒng)，便于替換與維護(hù)。
三、典型應(yīng)用領(lǐng)域
氣體供應(yīng)系統(tǒng)：控制氣閥開(kāi)閉、采集傳感器狀態(tài)。
溫控與工藝單元：輸入溫度、壓力等模擬量信號(hào)，輸出控制指令。
自動(dòng)化搬運(yùn)系統(tǒng)：與機(jī)械臂、升降平臺(tái)、傳送帶等設(shè)備進(jìn)行交互控制。
真空或清洗設(shè)備：反饋腔體壓力、門狀態(tài)、水氣開(kāi)關(guān)等狀態(tài)信息。
英文資料：
Introduction to TEL Tokyo Electron 3M81-005973-14 Input/Output Module
1、 Basic Information
Product model: 3M81-005973-14
Name definition: Input/Output Module (I/O Module) or SFLUX-AMP PCB (Signal Amplification Board)
Manufacturer: Tokyo Electron Ltd. (TEL)
Applicable equipment: Semiconductor process equipment, such as CVD, Etcher, Coater/Developer and other platform control systems
2、 Function and Function
Signal input/output interface
Receive and output digital or analog signals for establishing communication channels with field devices such as sensors, actuators, solenoid valves, etc.
Signal amplification and shaping
Integrated with signal amplification circuit (SFLUX-AMP), it can enhance or filter the input signal to improve signal quality and stability.
Electrical isolation function
Possible isolation circuit design can help suppress electromagnetic interference and protect the stable operation of the upper control system.
Modular integration
It can be combined with CPU modules, relay control boards, power modules, etc. to form a complete control system, making it easy to replace and maintain.
3、 Typical application areas
Gas supply system: Control the opening and closing of gas valves and collect sensor status.
Temperature control and process unit: Input analog signals such as temperature and pressure, and output control commands.
Automated handling system: interacts and controls with equipment such as robotic arms, lifting platforms, and conveyor belts.
Vacuum or cleaning equipment: feedback on chamber pressure, door status, water and gas switch status information.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
ASEA 2668 184-447 Communication Module
RadiSys 61-0475-12 Axis Control Module
RADISYS 97-9536-20 Ethernet Port Module
| IS220PAOCHIA IS220PAOCH1B | S5001 | BUS MONITOR |
| IS220PAICH2A IS220PAICH2B | 52010-00 | IMDSI02 |
| IS220PAICH1A IS220PAICH1B | SS2000PCI-2 | IMSET01 |
| IS215UCVGH1A | HA42A6-R233 | IMDS001 |
| IS215UCVFH2AB | SE06200-000000 | IMASI03 |
| IS215ACLEH1C | S60300-NA | IMASOO1 |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs
