Tokyo Electron 2L87-132494-12伺服電機(jī) PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)： 2L87-132494-12
產(chǎn)品名稱： 伺服電機(jī)（Servo Motor）
制造商： Tokyo Electron Ltd.（TEL）
產(chǎn)品類別： 精密電機(jī)驅(qū)動(dòng)部件
典型用途： 用于TEL半導(dǎo)體設(shè)備中的晶圓搬運(yùn)、定位、旋轉(zhuǎn)等自動(dòng)化系統(tǒng)
二、主要功能
高精度位置控制
該伺服電機(jī)與編碼器協(xié)同工作，實(shí)現(xiàn)微米級(jí)位置反饋和高速動(dòng)態(tài)響應(yīng)，用于機(jī)械臂、平臺(tái)滑軌、載物臺(tái)的精準(zhǔn)移動(dòng)。閉環(huán)伺服反饋系統(tǒng)
搭載絕對(duì)值或增量式編碼器，電機(jī)狀態(tài)實(shí)時(shí)反饋至主控制器，保證運(yùn)動(dòng)過(guò)程的閉環(huán)控制與安全。高可靠性與潔凈室適應(yīng)性
采用低發(fā)塵材料、密封結(jié)構(gòu)，符合半導(dǎo)體潔凈環(huán)境等級(jí)要求，支持 24 小時(shí)連續(xù)運(yùn)轉(zhuǎn)。
三、典型應(yīng)用場(chǎng)景
晶圓裝載單元（Load Port）：控制機(jī)械手或升降裝置，實(shí)現(xiàn)晶圓精準(zhǔn)放置。
涂膠顯影系統(tǒng)（Coater/Developer）：用于旋轉(zhuǎn)平臺(tái)或工藝腔體定位機(jī)構(gòu)。
蝕刻或CVD設(shè)備：驅(qū)動(dòng)氣閥控制系統(tǒng)或進(jìn)樣/出樣移動(dòng)裝置。
自動(dòng)對(duì)位系統(tǒng)：實(shí)現(xiàn)高速對(duì)準(zhǔn)、升降、偏移修正等動(dòng)作控制。
英文資料：
1、 Basic Information
Product model: 2L87-132494-12
Product Name: Servo Motor
Manufacturer: Tokyo Electron Ltd. (TEL)
Product Category: Precision Motor Drive Components
Typical use: Used for automated systems such as wafer handling, positioning, and rotation in TEL semiconductor equipment
2、 Main functions
High precision position control
This servo motor works in conjunction with an encoder to achieve micrometer level position feedback and high-speed dynamic response, used for precise movement of robotic arms, platform slides, and stages.
Closed loop servo feedback system
Equipped with absolute or incremental encoders, the motor status is fed back to the main controller in real-time, ensuring closed-loop control and safety during the motion process.
High reliability and cleanroom adaptability
Adopting low dust materials and sealed structure, it meets the requirements of semiconductor clean environment level and supports 24-hour continuous operation.
3、 Typical application scenarios
Load Port: Control the robotic arm or lifting device to achieve precise placement of wafers.
Coater/Developer: Used for rotating platforms or process chamber positioning mechanisms.
Etching or CVD equipment: Drive gas valve control system or sample injection/extraction moving device.
Automatic alignment system: realizes high-speed alignment, lifting, offset correction and other action control.
2.產(chǎn) 品 展 示
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