Tokyo Electron 1B80-002788-11傳感器板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
型號(hào)：1B80-000226-13
類型：傳感器信號(hào)采集板 / Sensor Input Board
生產(chǎn)廠商：Tokyo?Electron (TEL)
二、主要功能
檢測(cè)信號(hào)采集：接收溫度、壓力、流量、濕度等多種傳感器信號(hào)。
信號(hào)轉(zhuǎn)換：將模擬信號(hào)（如 4?20?mA、0?10?V）或數(shù)字信號(hào)轉(zhuǎn)換為控制系統(tǒng)可識(shí)別的格式。
信號(hào)隔離與抗干擾：通過光耦或隔離放大器提高精度與穩(wěn)定性。
反饋給主控單元：將處理后的數(shù)據(jù)通過背板總線或通信總線傳送給 CPU 或控制器模塊。
三、典型應(yīng)用
CVD/ALD/Etcher 等工藝設(shè)備：用于監(jiān)測(cè)反應(yīng)腔體的溫度和壓力。
氣體控制系統(tǒng)：采集流量計(jì)與壓力傳感器的信號(hào)，實(shí)現(xiàn)工藝控制。
溫控與冷卻系統(tǒng)：采集熱電偶/RTD 的溫度信號(hào)，用于閉環(huán)溫控系統(tǒng)。
安全控制：通過多路傳感器監(jiān)測(cè)設(shè)備狀態(tài)，提高操作可靠性與安全性。
四、推測(cè)技術(shù)特性
支持多路輸入信號(hào)通道（具體通道數(shù)需查證）
接口類型可能包括螺絲端子或DIN插頭
工業(yè)級(jí)隔離設(shè)計(jì)，適合潔凈室運(yùn)行環(huán)境
與 TEL 常見平臺(tái)（如 Trias、Unity?II、Celesta）兼容
英文資料：
1、 Basic Information
Model: 1B80-000226-13
Type: Sensor Signal Acquisition Board/Sensor Input Board
Manufacturer: Tokyo Electron (TEL)
2、 Main functions
Detection signal acquisition: Receive various sensor signals such as temperature, pressure, flow rate, humidity, etc.
Signal conversion: Convert analog signals (such as 4-20mA, 0-10V) or digital signals into a format recognizable by the control system.
Signal isolation and anti-interference: Improve accuracy and stability through optocouplers or isolation amplifiers.
Feedback to the main control unit: Transfer the processed data to the CPU or controller module through the backplane bus or communication bus.
3、 Typical applications
CVD/ALD/Etcher and other process equipment: used to monitor the temperature and pressure of the reaction chamber.
Gas control system: Collect signals from flow meters and pressure sensors to achieve process control.
Temperature control and cooling system: Collect temperature signals from thermocouples/RTDs for closed-loop temperature control systems.
Safety control: By monitoring equipment status through multiple sensors, operational reliability and safety are improved.
4、 Speculate on technical characteristics
Support multiple input signal channels (specific number of channels to be verified)
Interface types may include screw terminals or DIN plugs
Industrial grade isolation design, suitable for clean room operating environment
Compatible with common TEL platforms such as Trias, Unity II, Celesta
2.產(chǎn) 品 展 示
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