Tokyo Electron DS1181-000295-11電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron DS1181-000295-11 電路板 是東京電子(Tokyo Electron, TEL)公司生產(chǎn)的一款專用電路板,廣泛應(yīng)用于半導(dǎo)體制造設(shè)備中,作為設(shè)備內(nèi)部的控制、信號(hào)處理或接口模塊。該電路板負(fù)責(zé)連接和協(xié)調(diào)設(shè)備各個(gè)功能模塊,支持設(shè)備的自動(dòng)化運(yùn)行和精準(zhǔn)工藝控制。
一、產(chǎn)品基本信息
型號(hào): DS1181-000295-11
類型: 專用控制或接口電路板
制造商: Tokyo Electron Ltd.(TEL)
應(yīng)用范圍: 半導(dǎo)體制程設(shè)備內(nèi)部電子模塊
二、功能與作用
信號(hào)處理
負(fù)責(zé)采集、放大、轉(zhuǎn)換或過(guò)濾來(lái)自傳感器、開關(guān)、執(zhí)行器等的信號(hào)。
控制功能
實(shí)現(xiàn)特定功能的控制邏輯,如溫度控制、電機(jī)驅(qū)動(dòng)、閥門開關(guān)等。
接口連接
作為不同子系統(tǒng)間的連接橋梁,支持多種通信協(xié)議和信號(hào)標(biāo)準(zhǔn)。
系統(tǒng)集成
集成到設(shè)備主控架構(gòu)中,確保設(shè)備各部分協(xié)調(diào)運(yùn)行。
三、典型應(yīng)用領(lǐng)域
CVD、Etcher、ALD等半導(dǎo)體設(shè)備的工藝控制模塊
氣體供應(yīng)系統(tǒng)的控制與監(jiān)測(cè)
運(yùn)動(dòng)控制與定位系統(tǒng)
設(shè)備狀態(tài)反饋與安全聯(lián)鎖
英文資料:
The TEL Tokyo Electron DS1181-000295-11 circuit board is a specialized circuit board produced by Tokyo Electron (TEL), widely used in semiconductor manufacturing equipment as an internal control, signal processing, or interface module. This circuit board is responsible for connecting and coordinating various functional modules of the equipment, supporting automated operation and precise process control of the equipment.
1、 Basic Product Information
Model: DS1181-000295-11
Type: Dedicated control or interface circuit board
Manufacturer: Tokyo Electron Ltd. (TEL)
Application scope: Electronic modules inside semiconductor process equipment
2、 Function and Function
Signal Processing
Responsible for collecting, amplifying, converting, or filtering signals from sensors, switches, actuators, etc.
control function
Implement control logic for specific functions, such as temperature control, motor drive, valve switching, etc.
Interface connection
As a bridge connecting different subsystems, it supports multiple communication protocols and signal standards.
system integration
Integrate into the device's main control architecture to ensure coordinated operation of all parts of the device.
3、 Typical application areas
Process control modules for semiconductor equipment such as CVD, Etcher, ALD, etc
Control and Monitoring of Gas Supply System
Motion Control and Positioning System
Equipment status feedback and safety interlocking
2.產(chǎn) 品 展 示
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