Tokyo Electron 81-690004-1電機單元分布板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 81-690004-1 電機單元分布板
產(chǎn)品概述：
81-690004-1 是 Tokyo Electron（TEL）設(shè)備中的專用控制分布板，用于多個電機單元的電源與控制信號集中管理，常用于 EFEM、Load Port、CVD、Etch 等系統(tǒng)中的電機驅(qū)動模塊之間的協(xié)調(diào)控制。
功能特點：
電源分配功能
將主電源（如 +24V 或 +48V DC）統(tǒng)一分配至多個電機控制器或驅(qū)動模塊，支持獨立保險或狀態(tài)指示。控制信號管理
接收來自主控系統(tǒng)的啟停、方向、脈沖等控制信號，并分發(fā)至各個電機通道，實現(xiàn)多軸同步控制。狀態(tài)反饋整合
匯總各個電機驅(qū)動模塊的運行、報警、到位等信號，并反饋給上位控制系統(tǒng)，實現(xiàn)整體狀態(tài)監(jiān)控。保護功能
每路通道帶有過流保護、電壓隔離、短路防護等，確保系統(tǒng)運行穩(wěn)定可靠。
典型應(yīng)用：
EFEM模塊：控制搬運機械臂、對位平臺、升降機構(gòu)等電機；
Load Port裝置：驅(qū)動 FOUP 門機構(gòu)或推送機構(gòu)；
刻蝕系統(tǒng)：用于腔體內(nèi)活動部件控制；
涂膠/顯影設(shè)備：用于托盤、轉(zhuǎn)臺等執(zhí)行機構(gòu)的控制。
技術(shù)參數(shù)（典型值）：
輸入電壓：+24V DC 或 +48V DC
控制通道：4~8 路電機控制輸出通道
接口類型：多種排線、接插件連接方式
通信方式：通過背板或排線與控制主板連接
工作環(huán)境：潔凈室兼容，0~50℃，抗干擾設(shè)計
英文資料：
TEL Tokyo Electron 81-69004-1 Motor Unit Distribution Board
Product Overview:
81-69004-1 is a dedicated control distribution board in Tokyo Electron (TEL) equipment, used for centralized management of power and control signals for multiple motor units. It is commonly used for coordinated control between motor drive modules in EFEM, Load Port, CVD, Etch and other systems.
Functional features:
Power distribution function
Distribute the main power supply (such as+24V or+48V DC) uniformly to multiple motor controllers or drive modules, supporting independent insurance or status indication.
Control signal management
Receive control signals such as start stop, direction, and pulse from the main control system, and distribute them to various motor channels to achieve multi axis synchronous control.
Integration of status feedback
Summarize the operation, alarm, and arrival signals of each motor drive module and provide feedback to the upper control system to achieve overall status monitoring.
Protection function
Each channel is equipped with overcurrent protection, voltage isolation, short circuit protection, etc., to ensure stable and reliable system operation.
Typical applications:
EFEM module: controls motors for handling robotic arms, alignment platforms, lifting mechanisms, etc;
Load Port device: drives FOUP door mechanism or push mechanism;
Etching system: used for controlling moving parts inside the cavity;
Gluing/developing equipment: used for controlling actuators such as trays and turntables.
Technical parameters (typical values):
Input voltage:+24V DC or+48V DC
Control channel: 4-8 motor control output channels
Interface type: Multiple cable and connector connection methods
Communication method: Connected to the control motherboard through a backplane or ribbon cable
Work environment: cleanroom compatible, 0-50 ℃, anti-interference design
2.產(chǎn) 品 展 示
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