Tokyo Electron 3D80-001480-V1電源單元組件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3D80-001480-V1 電源單元組件（Power Supply Unit Assembly） 是一款用于半導(dǎo)體設(shè)備中的工業(yè)級(jí)電源模塊組件，專為 Tokyo Electron（TEL）高精密設(shè)備控制系統(tǒng)提供穩(wěn)定、可靠的多路直流電源輸出，保障各功能模塊（如處理器、I/O控制板、接口模塊、傳感器系統(tǒng)等）長(zhǎng)時(shí)間穩(wěn)定運(yùn)行。
一、基本信息
產(chǎn)品型號(hào)： 3D80-001480-V1
產(chǎn)品名稱： 電源單元組件（Power Supply Unit Assembly）
制造商： Tokyo Electron Ltd.（TEL）
組件類型： 模塊化電源系統(tǒng) / 工業(yè)電源分配組件
典型設(shè)備應(yīng)用： TEL Etch、CVD、Coater/Developer、EFEM 等主控制機(jī)架內(nèi)
二、核心功能
多路直流電源輸出
向多個(gè)子系統(tǒng)提供不同電壓等級(jí)（如 +24V、+12V、+5V、±15V DC）；
滿足控制系統(tǒng)、I/O模塊、CPU板、顯示模塊等對(duì)電源的需求。
輸入電壓穩(wěn)壓與濾波
接收 AC 或 DC 主輸入電源，通過(guò)內(nèi)部整流與穩(wěn)壓電路進(jìn)行處理；
內(nèi)置濾波、浪涌抑制、過(guò)壓保護(hù)等功能，提升系統(tǒng)穩(wěn)定性。
模塊化輸出接口
采用背板插接或航空插頭方式，將電源輸出連接到各控制板卡；
支持冗余輸出、獨(dú)立通道管理，提高系統(tǒng)可靠性與維護(hù)效率。
系統(tǒng)狀態(tài)監(jiān)控
具備輸出狀態(tài)監(jiān)控、故障診斷（如過(guò)載、過(guò)溫、欠壓）；
可將電源狀態(tài)信號(hào)反饋給主控系統(tǒng)（如3D81-或E244系列控制器）。
英文資料：
The Tokyo Electron 3D80-001480-V1 Power Supply Unit Assembly is an industrial grade power module component used in semiconductor equipment. It is designed to provide stable and reliable multi-channel DC power output for the high-precision equipment control system of Tokyo Electron (TEL), ensuring the long-term stable operation of various functional modules such as processors, I/O control boards, interface modules, sensor systems, etc.
1、 Basic Information
Product model: 3D80-001480-V1
Product Name: Power Supply Unit Assembly
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Modular power system/Industrial power distribution component
Typical equipment applications: TEL Etch, CVD, Coater/Developer, EFEM and other main control racks
2、 Core functions
Multi channel DC power output
Provide different voltage levels (such as+24V,+12V,+5V, ± 15V DC) to multiple subsystems;
Meet the power requirements of control systems, I/O modules, CPU boards, display modules, etc.
Input voltage stabilization and filtering
Receive AC or DC main input power and process it through internal rectification and voltage regulation circuits;
Built in filtering, surge suppression, overvoltage protection and other functions enhance system stability.
Modular output interface
Connect the power output to each control board using backplane or aviation plugs;
Support redundant output and independent channel management to improve system reliability and maintenance efficiency.
System status monitoring
Capable of output status monitoring and fault diagnosis (such as overload, overheating, undervoltage);
The power status signal can be fed back to the main control system (such as 3D81- or E244 series controllers).
2.產(chǎn) 品 展 示
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