Tokyo Electron 3D81-000040-12處理器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3D81-000040-12 處理器模塊（Processor Module） 是一款集成于 TEL 半導(dǎo)體設(shè)備中的核心計(jì)算與控制單元，主要用于執(zhí)行設(shè)備工藝控制邏輯、通信協(xié)議處理、數(shù)據(jù)采集與響應(yīng)，是系統(tǒng)架構(gòu)中的“主腦”組件之一。該模塊通常應(yīng)用于 TEL 的刻蝕（Etch）、CVD、清洗、晶圓搬運(yùn)等設(shè)備的控制框架中，起著協(xié)調(diào)各子系統(tǒng)運(yùn)行的關(guān)鍵作用。
一、基本信息
產(chǎn)品型號(hào)： 3D81-000040-12
產(chǎn)品名稱： 處理器模塊（Processor Board / CPU Module）
制造商： Tokyo Electron Ltd.（TEL）
安裝方式： 控制背板插卡式 / 模塊化機(jī)架結(jié)構(gòu)
定位功能： 工藝控制主機(jī) / 嵌入式工業(yè)CPU模塊
二、主要功能
中央處理與控制
執(zhí)行預(yù)設(shè)的設(shè)備運(yùn)行邏輯程序；
處理所有來自 I/O 板卡、傳感器模塊、通信接口的數(shù)據(jù)輸入；
管理執(zhí)行輸出動(dòng)作，如開閥、控溫、運(yùn)行序列控制等。
通信協(xié)調(diào)
作為設(shè)備內(nèi)部控制總線的主控節(jié)點(diǎn)，與其他控制板（如 I/O 板、通信模塊、數(shù)字量板卡）進(jìn)行高速通信；
提供以太網(wǎng)、串口（RS232/RS485）、CAN 或 TEL 專用總線支持。
數(shù)據(jù)處理與監(jiān)控
實(shí)時(shí)采集、處理并記錄設(shè)備關(guān)鍵運(yùn)行參數(shù)；
向 HMI 顯示系統(tǒng)或 MES 工廠系統(tǒng)發(fā)送運(yùn)行狀態(tài)與數(shù)據(jù)報(bào)告。
聯(lián)鎖與故障響應(yīng)
管理安全聯(lián)鎖邏輯，處理異常停機(jī)、開門保護(hù)、氣壓異常等關(guān)鍵邏輯；
支持自動(dòng)診斷與故障代碼輸出。
英文資料：
The Tokyo Electron 3D81-000040-12 Processor Module is a core computing and control unit integrated into TEL semiconductor equipment. It is mainly used to execute equipment process control logic, communication protocol processing, data acquisition and response, and is one of the "main brain" components in the system architecture. This module is usually applied in the control framework of TEL's etching (Etch), CVD, cleaning, wafer handling and other equipment, playing a key role in coordinating the operation of various subsystems.
1、 Basic Information
Product model: 3D81-000040-12
Product Name: Processor Board/CPU Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Installation method: Control backplane plug-in card/modular rack structure
Positioning function: Process control host/embedded industrial CPU module
2、 Main functions
Central Processing and Control
Execute the preset device running logic program;
Process all data inputs from I/O boards, sensor modules, and communication interfaces;
Manage the execution of output actions, such as valve opening, temperature control, and sequence control during operation.
Communication coordination
As the main control node of the internal control bus of the device, it performs high-speed communication with other control boards (such as I/O boards, communication modules, and digital cards);
Provide Ethernet, serial port (RS232/RS485), CAN or TEL dedicated bus support.
Data processing and monitoring
Real time collection, processing, and recording of key operating parameters of equipment;
Send operational status and data reports to the HMI display system or MES factory system.
Interlocking and Fault Response
Manage safety interlock logic, handle critical logic such as abnormal shutdown, door opening protection, and abnormal air pressure;
Support automatic diagnosis and fault code output.
2.產(chǎn) 品 展 示
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