Tokyo Electron 3M81-039749-23 PCB板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3M81-039749-23 PCB板 是 Tokyo Electron 半導(dǎo)體制造設(shè)備中關(guān)鍵的印刷電路板,主要用于設(shè)備控制系統(tǒng)的信號(hào)處理與連接。該P(yáng)CB板通常集成信號(hào)接口、電源分配和輔助控制功能,是設(shè)備內(nèi)部電子系統(tǒng)的重要組成部分。
以下為該P(yáng)CB板的詳細(xì)產(chǎn)品應(yīng)用領(lǐng)域及功能說(shuō)明(無(wú)圖案):
一、基本信息
產(chǎn)品型號(hào): 3M81-039749-23
產(chǎn)品名稱: 印刷電路板(PCB)
制造商: Tokyo Electron Ltd.(TEL)
部件類別: 控制系統(tǒng)專用PCB板
二、主要功能
信號(hào)接口與連接
實(shí)現(xiàn)設(shè)備各控制模塊間的電氣連接與信號(hào)傳輸;
兼容多種信號(hào)類型,支持?jǐn)?shù)字與模擬信號(hào)的穩(wěn)定傳遞。
電源管理
負(fù)責(zé)為各電子元件和模塊提供穩(wěn)定的電源供應(yīng);
集成濾波和穩(wěn)壓元件,保障系統(tǒng)運(yùn)行可靠。
輔助控制邏輯
搭載部分邏輯電路,輔助實(shí)現(xiàn)設(shè)備功能控制和狀態(tài)判斷;
支持與主控板及其他I/O模塊的通信與協(xié)調(diào)。
三、典型應(yīng)用領(lǐng)域
刻蝕設(shè)備(Etcher)
用于信號(hào)集成與分配,支持氣體流控、射頻功率控制等系統(tǒng)。CVD及ALD設(shè)備
控制溫度、壓力傳感信號(hào)的接口處理及執(zhí)行器信號(hào)輸出。輸送系統(tǒng)及前后處理設(shè)備
管理機(jī)械動(dòng)作、位置反饋等信號(hào),確保晶圓搬運(yùn)安全可靠。
英文資料:
The TEL Tokyo Electron 3M81-039749-23 PCB board is a key printed circuit board in Tokyo Electron semiconductor manufacturing equipment, mainly used for signal processing and connection of equipment control systems. This PCB board typically integrates signal interfaces, power distribution, and auxiliary control functions, and is an important component of the internal electronic system of the device.
The following is a detailed product application area and functional description of the PCB board (without patterns):
1、 Basic Information
Product model: 3M81-039749-23
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Ltd. (TEL)
Component category: Control system dedicated PCB board
2、 Main functions
Signal interface and connection
Realize electrical connections and signal transmission between various control modules of the equipment;
Compatible with multiple signal types, supporting stable transmission of digital and analog signals.
Power management
Responsible for providing stable power supply for various electronic components and modules;
Integrate filtering and voltage stabilizing components to ensure reliable system operation.
Auxiliary control logic
Equipped with partial logic circuits to assist in achieving device function control and status judgment;
Support communication and coordination with the main control board and other I/O modules.
3、 Typical application areas
Etcher equipment
Used for signal integration and distribution, supporting systems such as gas flow control and RF power control.
CVD and ALD equipment
Interface processing and actuator signal output for temperature and pressure sensing signals.
Conveyor system and pre-processing equipment
Manage mechanical actions, position feedback, and other signals to ensure safe and reliable wafer handling.
2.產(chǎn) 品 展 示
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