Tokyo Electron 381-500242-B輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-500242-B 輸入輸出模塊（I/O Module） 是 Tokyo Electron 半導(dǎo)體制造設(shè)備中用于采集和輸出控制信號的核心功能部件之一。此類模塊廣泛應(yīng)用于 TEL 的刻蝕設(shè)備（Etcher）、CVD、ALD、光刻前后處理設(shè)備以及輸送系統(tǒng)（EFEM、Load Port）中，主要功能是管理與設(shè)備運行相關(guān)的各種傳感器和執(zhí)行器之間的信號交互。
以下為不含圖案的詳細技術(shù)與應(yīng)用說明：
一、基本信息
產(chǎn)品型號： 381-500242-B
產(chǎn)品名稱： 輸入輸出模塊（I/O Module）
制造商： Tokyo Electron Ltd.（TEL）
模塊類別： 控制系統(tǒng) I/O 板卡（Digital/Analog Input-Output）
二、核心功能
輸入信號采集
支持采集來自限位開關(guān)、傳感器、光電檢測器、真空/溫度監(jiān)測設(shè)備等的數(shù)字量或模擬量信號；
實時傳輸至主控制器進行邏輯判斷與動作觸發(fā)。
輸出信號控制
向電磁閥、繼電器、步進驅(qū)動器、加熱器等設(shè)備輸出控制信號；
實現(xiàn)自動化動作的觸發(fā)（如腔體門開啟、平臺移動、閥門切換等）。
信號隔離與抗干擾
支持電氣隔離設(shè)計，保障設(shè)備在高EMI環(huán)境下的信號穩(wěn)定；
內(nèi)置防反接、防過載保護電路。
系統(tǒng)聯(lián)動與緊急控制
與主控系統(tǒng)聯(lián)動，實現(xiàn)復(fù)雜工藝流程的同步控制；
支持安全聯(lián)鎖（interlock）、急?；芈贰顟B(tài)反饋處理。
三、典型應(yīng)用場景
刻蝕設(shè)備（Etcher）
控制氣體閥門、真空腔門、射頻電源聯(lián)動，監(jiān)控氣壓/溫度等狀態(tài)。
CVD/ALD 系統(tǒng)
輸出氣體路徑選擇信號，輸入反應(yīng)腔壓力、流速監(jiān)控數(shù)據(jù)。
清洗系統(tǒng)
控制藥液進出、加熱板工作、排水動作，監(jiān)測液位和溫度。
輸送系統(tǒng)（EFEM/Load Port）
控制晶圓傳送機構(gòu)、對位系統(tǒng)、門鎖系統(tǒng)、傳感器狀態(tài)回饋。
光刻前后處理設(shè)備
控制旋轉(zhuǎn)臺、加熱冷卻裝置、自動對準設(shè)備的啟動和狀態(tài)檢測。
英文資料：
The TEL Tokyo Electron 381-500242-B Input/Output Module (I/O Module) is one of the core functional components used in Tokyo Electron semiconductor manufacturing equipment for collecting and outputting control signals. This type of module is widely used in TEL's etching equipment (Etcher), CVD, ALD, lithography pre-processing and post-processing equipment, as well as transport systems (EFEM, Load Port). Its main function is to manage the signal interaction between various sensors and actuators related to equipment operation.
The following are detailed technical and application instructions without patterns:
1、 Basic Information
Product model: 381-500242-B
Product Name: I/O Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module Category: Control System I/O Board (Digital/Analog Input Output)
2、 Core functions
Input signal acquisition
Support the collection of digital or analog signals from limit switches, sensors, photodetectors, vacuum/temperature monitoring equipment, etc;
Real time transmission to the main controller for logical judgment and action triggering.
Output signal control
Output control signals to devices such as solenoid valves, relays, stepper drivers, heaters, etc;
Trigger automated actions (such as opening chamber doors, moving platforms, switching valves, etc.).
Signal isolation and anti-interference
Support electrical isolation design to ensure signal stability of equipment in high EMI environments;
Built in anti reverse and anti overload protection circuits.
System linkage and emergency control
Integrate with the main control system to achieve synchronous control of complex process flows;
Support safety interlock, emergency stop circuit, and status feedback processing.
3、 Typical application scenarios
Etcher equipment
Control gas valves, vacuum chamber doors, RF power supply linkage, monitor gas pressure/temperature and other status.
CVD/ALD system
Output gas path selection signal, input reaction chamber pressure and flow rate monitoring data.
Cleaning system
Control the inflow and outflow of medication, heating plate operation, drainage action, and monitor the liquid level and temperature.
Conveyor System (EFEM/Load Port)
Control the wafer transfer mechanism, alignment system, door lock system, and sensor status feedback.
Photolithography pre-processing and post-processing equipment
Control the start-up and status detection of the rotary table, heating and cooling device, and automatic alignment equipment.
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