Tokyo Electron 3M87-021476-12燃氣系統(tǒng) PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M87-021476-12 燃氣系統(tǒng) 是東京電子（TEL）半導體制造設(shè)備中的關(guān)鍵子系統(tǒng)，負責控制和管理工藝所需各類氣體的供應(yīng)、流量調(diào)節(jié)和安全監(jiān)測，保障生產(chǎn)過程的穩(wěn)定性和安全性。
一、產(chǎn)品概述
| 項目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 燃氣系統(tǒng)（Gas System） |
| 產(chǎn)品型號 | 3M87-021476-12 |
| 制造廠商 | Tokyo Electron Ltd.（東京電子） |
| 功能定位 | 氣體供應(yīng)、流量控制與安全監(jiān)測 |
二、核心功能
氣體供應(yīng)管理
負責將高純度工藝氣體按要求輸送至設(shè)備工藝腔體；
支持多種氣體類型，如氮氣、氫氣、氬氣等。
流量調(diào)節(jié)與控制
精確控制氣體流量，確保工藝參數(shù)的穩(wěn)定；
配備流量計、閥門和調(diào)節(jié)器實現(xiàn)自動調(diào)節(jié)。
安全保護機制
監(jiān)測氣體壓力、泄漏與異常狀態(tài)，保障設(shè)備和操作安全；
設(shè)有報警系統(tǒng)，及時響應(yīng)緊急情況。
三、應(yīng)用領(lǐng)域
半導體制造中的蝕刻、沉積、清洗等工藝氣體管理；
工藝流程中的氣體混合與分配控制；
設(shè)備整體安全系統(tǒng)的重要組成部分。
英文資料：
The TEL Tokyo Electron 3M87-021476-12 gas system is a key subsystem in the semiconductor manufacturing equipment of Tokyo Electronics (TEL), responsible for controlling and managing the supply, flow regulation, and safety monitoring of various gases required for the process, ensuring the stability and safety of the production process.
1、 Product Overview
Project Content
Product Name: Gas System
Product model 3M87-021476-12
Manufacturer Tokyo Electron Ltd
Functional positioning: gas supply, flow control, and safety monitoring
2、 Core functions
Gas supply management
Responsible for delivering high-purity process gas to the equipment process chamber as required;
Supports multiple gas types, such as nitrogen, hydrogen, argon, etc.
Flow regulation and control
Accurately control the gas flow rate to ensure the stability of process parameters;
Equipped with flow meters, valves, and regulators to achieve automatic adjustment.
Security protection mechanism
Monitor gas pressure, leaks, and abnormal conditions to ensure equipment and operational safety;
Equipped with an alarm system to promptly respond to emergency situations.
3、 Application Fields
Gas management for processes such as etching, deposition, and cleaning in semiconductor manufacturing;
Gas mixing and distribution control in the process flow;
An important component of the overall security system of the equipment.
2.產(chǎn) 品 展 示
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