Tokyo Electron 381-600316-3驅(qū)動板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-600316-3 驅(qū)動板 是東京電子（TEL）半導體制造設備中的關(guān)鍵執(zhí)行控制模塊，主要負責驅(qū)動和控制設備中的電機、閥門等執(zhí)行機構(gòu)，實現(xiàn)精準動作和工藝流程的自動化控制。
一、產(chǎn)品概述
| 項目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 驅(qū)動板（Driver Board） |
| 產(chǎn)品型號 | 381-600316-3 |
| 制造商 | Tokyo Electron Ltd.（東京電子） |
| 功能定位 | 電機及執(zhí)行機構(gòu)驅(qū)動與控制 |
二、核心功能
執(zhí)行機構(gòu)驅(qū)動
控制步進電機、伺服電機或直流電機的啟動、停止、速度及位置；
驅(qū)動電磁閥、繼電器等開關(guān)類執(zhí)行元件。
信號轉(zhuǎn)換與放大
將控制系統(tǒng)輸出的低電平信號放大為執(zhí)行元件所需的驅(qū)動電流和電壓；
提供電氣隔離，保護控制系統(tǒng)免受電流沖擊。
反饋監(jiān)測
支持傳感器信號反饋，監(jiān)測驅(qū)動狀態(tài)和故障，保障動作準確可靠。
三、典型應用場景
半導體設備中各類機械部件的驅(qū)動控制，如晶圓搬運機械臂、電機驅(qū)動軸、氣動閥門控制等。
自動化工藝流程中，執(zhí)行精準動作控制的關(guān)鍵部件。
英文資料：
The TEL Tokyo Electron 381-600316-3 driver board is a key execution control module in the semiconductor manufacturing equipment of Tokyo Electronics (TEL). It is mainly responsible for driving and controlling the actuators such as motors and valves in the equipment, achieving precise action and automated control of the process flow.
1、 Product Overview
Project Content
Product Name: Driver Board
Product model 381-600316-3
Manufacturer Tokyo Electron Ltd
Functional positioning motor and actuator drive and control
2、 Core functions
Execution mechanism driver
Control the start, stop, speed, and position of stepper motors, servo motors, or DC motors;
Drive switch actuators such as solenoid valves and relays.
Signal conversion and amplification
Amplify the low-level signal output by the control system into the driving current and voltage required by the actuator;
Provide electrical isolation to protect the control system from current surges.
Feedback monitoring
Support sensor signal feedback, monitor drive status and faults, and ensure accurate and reliable actions.
3、 Typical application scenarios
Drive control of various mechanical components in semiconductor equipment, such as wafer handling robotic arms, motor drive shafts, pneumatic valve control, etc.
The key component that executes precise action control in automated process flow.
2.產(chǎn) 品 展 示
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