Tokyo Electron 3M80-002733-11保險絲模塊 PDF資料
1.產 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3M80-002733-11 保險絲模塊 是一款專用于半導體制造設備的電路保護單元,屬于東京電子(TEL)設備中的標準安全模塊,主要用于對控制系統(tǒng)、電源系統(tǒng)或信號通道中的關鍵電路提供過流保護,防止異常電流損壞元件或引發(fā)設備故障。
一、產品概述
項目 | 內容 |
---|---|
產品名稱 | 保險絲模塊(Fuse Module) |
產品型號 | 3M80-002733-11 |
所屬品牌 | Tokyo Electron Ltd.(東京電子) |
應用類別 | 電氣保護模塊,過流保護 |
二、核心功能
電路過流保護
對電源供給線或控制線路進行實時電流限制;
在過載或短路發(fā)生時自動熔斷保險絲,切斷故障電路。
獨立保險絲分區(qū)
模塊內部通常包含多個保險絲座位,可保護多個子電路;
每個保險絲通道可獨立替換,方便維護。
配合主控系統(tǒng)聯(lián)動
某些型號可能配備保險絲熔斷檢測功能,可向主控制系統(tǒng)反饋狀態(tài)信號;
便于故障快速定位與系統(tǒng)報警聯(lián)動。
三、典型應用領域
晶圓處理設備內部電源保護
用于涂膠顯影設備、蝕刻機、清洗機等控制電路、電機驅動電路的安全隔離。
自動化控制系統(tǒng)分段電路保護
各模塊的控制板、電磁閥、傳感器等部件的專用電流保護點。
高可靠性工業(yè)設備
符合潔凈室與高穩(wěn)定性需求,適用于需要長期連續(xù)運行的生產系統(tǒng)。
英文資料:
The TEL Tokyo Electron 3M80-002733-11 fuse module is a circuit protection unit specifically designed for semiconductor manufacturing equipment. It is a standard safety module in Tokyo Electronics (TEL) equipment and is mainly used to provide overcurrent protection for critical circuits in control systems, power systems, or signal channels, preventing abnormal currents from damaging components or causing equipment failures.
1、 Product Overview
Project Content
Product Name Fuse Module
Product model 3M80-002733-11
Belonging to Tokyo Electron Ltd
Application category: Electrical protection module, overcurrent protection
2、 Core functions
Circuit overcurrent protection
Real time current limitation on power supply lines or control lines;
Automatically blow the fuse when overload or short circuit occurs, cutting off the faulty circuit.
Independent fuse partition
The module usually contains multiple fuse seats inside, which can protect multiple sub circuits;
Each fuse channel can be independently replaced for easy maintenance.
Cooperate with the main control system linkage
Some models may be equipped with fuse breakage detection function, which can provide feedback status signals to the main control system;
Facilitate quick fault location and system alarm linkage.
3、 Typical application areas
Internal power protection for wafer processing equipment
Used for safe isolation of control circuits and motor drive circuits in coating and developing equipment, etching machines, cleaning machines, etc.
Automated control system segmented circuit protection
Special current protection points for control boards, solenoid valves, sensors, and other components of each module.
High reliability industrial equipment
Meets the requirements of clean rooms and high stability, suitable for production systems that require long-term continuous operation.
2.產 品 展 示
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