Tokyo Electron E244-010015-11中央控制器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱： TEL Tokyo Electron E244-010015-11
類型： 中央控制器模塊（Central Controller Module）
制造商： Tokyo Electron Ltd.（TEL）
一、主要應(yīng)用領(lǐng)域
半導(dǎo)體制造設(shè)備控制系統(tǒng)
用于TEL品牌的干法刻蝕（Etch）、CVD、ALD、清洗、光刻等設(shè)備中，負責(zé)設(shè)備核心控制與流程管理。
多模塊協(xié)調(diào)與通信管理
控制各子系統(tǒng)如氣體供應(yīng)系統(tǒng)、真空腔體、溫控模塊、運動組件等的協(xié)同運行；
通過總線接口或自定義通信協(xié)議與各控制板進行高效數(shù)據(jù)交互。
工藝流程邏輯控制
實現(xiàn)自動工藝流程的時序控制和執(zhí)行判斷；
保證工藝順序、操作精度和參數(shù)一致性，提升成品率。
實時數(shù)據(jù)處理與報警聯(lián)動
對壓力、溫度、流量、電流等傳感器數(shù)據(jù)進行實時采集與處理；
根據(jù)邏輯判斷結(jié)果觸發(fā)報警或聯(lián)動保護機制（如關(guān)閉電源、氣體切斷等）。
設(shè)備運行日志與系統(tǒng)診斷
記錄運行過程中的關(guān)鍵參數(shù)、操作步驟、故障信息；
提供歷史回溯與運維診斷支持，有助于故障分析和工藝優(yōu)化。
通信與遠程接口支持
支持與上位機通信（如SECS/GEM協(xié)議），用于生產(chǎn)線集中管理和遠程監(jiān)控；
可集成至MES系統(tǒng)，實現(xiàn)制造信息化與自動化。
英文資料：
Product Name: TEL Tokyo Electron E244-010015-11
Type: Central Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Main application areas
Semiconductor manufacturing equipment control system
Responsible for equipment core control and process management in dry etching (Etch), CVD, ALD, cleaning, photolithography, and other equipment used for TEL brand.
Multi module coordination and communication management
Control the coordinated operation of various subsystems such as gas supply system, vacuum chamber, temperature control module, motion components, etc;
Efficient data exchange with various control boards through bus interfaces or custom communication protocols.
Process logic control
Realize timing control and execution judgment of automatic process flow;
Ensure process sequence, operational accuracy, and parameter consistency to improve yield.
Real time data processing and alarm linkage
Real time collection and processing of sensor data such as pressure, temperature, flow rate, and current;
Trigger an alarm or linkage protection mechanism based on logical judgment results (such as turning off power, cutting off gas, etc.).
Equipment operation log and system diagnosis
Record key parameters, operating steps, and fault information during operation;
Providing historical tracing and operational diagnostic support helps with fault analysis and process optimization.
Communication and remote interface support
Support communication with upper computer (such as SECS/GEM protocol) for centralized management and remote monitoring of production lines;
Can be integrated into MES system to achieve manufacturing informatization and automation.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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