Tokyo Electron 2981-600465-11連接板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 2981-600465-11 連接板 是應用于TEL半導體設備中的專用接口組件，主要用于設備內(nèi)部模塊之間的電信號連接與分配。
一、主要功能
實現(xiàn)控制板與其他功能模塊之間的電信號傳輸。
提供穩(wěn)定的電源與信號連接，支持高速數(shù)據(jù)和低噪聲傳輸。
用于設備模塊化設計中的統(tǒng)一接口平臺，便于安裝與維護。
二、應用領域
半導體蝕刻設備：在主控系統(tǒng)與真空腔體、傳感器、執(zhí)行器之間建立連接。
薄膜沉積設備（CVD/ALD）：連接腔體內(nèi)部溫控單元、氣體閥組、真空監(jiān)控部件。
光刻設備：作為光源控制模塊與系統(tǒng)控制主板之間的信號通道。
清洗或顯影設備（Clean Track）：用于將多個子模塊與中央控制單元連接。
三、特性
多通道信號接口，適用于復雜的內(nèi)部控制系統(tǒng)。
配備標準連接器，便于模塊化維護更換。
布線結構規(guī)范，符合TEL設備電磁兼容與電氣安全要求。
英文資料：
The Tokyo Electron 2981-600465-11 connection board is a specialized interface component used in TEL semiconductor equipment, mainly for electrical signal connection and distribution between internal modules of the equipment.
1、 Main functions
Realize the transmission of electrical signals between the control board and other functional modules.
Provide stable power and signal connections, support high-speed data and low-noise transmission.
A unified interface platform for modular design of equipment, facilitating installation and maintenance.
2、 Application Fields
Semiconductor etching equipment: Establish connections between the main control system and the vacuum chamber, sensors, and actuators.
Thin film deposition equipment (CVD/ALD): Connect the temperature control unit, gas valve group, and vacuum monitoring components inside the chamber.
Lithography equipment: serves as a signal channel between the light source control module and the system control motherboard.
Cleaning or developing equipment (Clean Track): used to connect multiple submodules to the central control unit.
3、 Characteristics
Multi channel signal interface, suitable for complex internal control systems.
Equipped with standard connectors for modular maintenance and replacement.
The wiring structure specification complies with the electromagnetic compatibility and electrical safety requirements of TEL equipment.
2.產(chǎn) 品 展 示
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