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Tokyo Electron 5139-000072-31射頻匹配模塊 PDF資料 

1.產(chǎn) 品 資 料 介 紹：

中文資料：

Tokyo Electron (TEL) 5139-000072-31 射頻匹配模塊 — 產(chǎn)品應(yīng)用領(lǐng)域詳解

1. 半導(dǎo)體制造設(shè)備中的射頻功率傳輸優(yōu)化

• 核心作用：射頻匹配模塊用于調(diào)節(jié)射頻信號(hào)的阻抗匹配，最大化射頻功率傳輸效率，減少信號(hào)反射損耗。

• 關(guān)鍵意義：確保等離子體工藝（如刻蝕、沉積）中的射頻能量穩(wěn)定傳遞，提高工藝一致性和加工質(zhì)量。

• 應(yīng)用場(chǎng)景：等離子刻蝕設(shè)備、化學(xué)氣相沉積（CVD）系統(tǒng)、高頻功率供應(yīng)鏈路等。

2. 射頻系統(tǒng)的穩(wěn)定控制

• 動(dòng)態(tài)匹配調(diào)整：模塊能夠?qū)崟r(shí)監(jiān)測(cè)射頻參數(shù)，自動(dòng)調(diào)整匹配狀態(tài)，適應(yīng)工藝變化，保持系統(tǒng)穩(wěn)定運(yùn)行。

• 防止設(shè)備損壞：有效避免由于阻抗不匹配導(dǎo)致的反射功率回流，保護(hù)射頻功率源和相關(guān)組件。

3. 高頻信號(hào)處理與傳輸

• 信號(hào)完整性保障：優(yōu)化射頻信號(hào)的傳輸路徑，減少信號(hào)失真和干擾。

• 提高設(shè)備性能：提升射頻系統(tǒng)的工作效率，保障工藝的高重復(fù)性和精確性。

4. 工業(yè)自動(dòng)化中的關(guān)鍵射頻組件

• 集成應(yīng)用：作為半導(dǎo)體制造設(shè)備中不可或缺的射頻模塊，支持整體自動(dòng)化控制系統(tǒng)的高效協(xié)同。

• 環(huán)境適應(yīng)性：設(shè)計(jì)滿足高潔凈度和高穩(wěn)定性環(huán)境要求，適合半導(dǎo)體制造復(fù)雜工藝需求。

英文資料：

Tokyo Electron (TEL) 5139-000072-31 RF Matching Module - Product Application Field Detailed Explanation

Optimization of RF power transmission in semiconductor manufacturing equipment

Core function: The RF matching module is used to adjust the impedance matching of RF signals, maximize RF power transmission efficiency, and reduce signal reflection loss.

Key significance: Ensure stable transmission of RF energy in plasma processes (such as etching and deposition), improve process consistency and processing quality.

Application scenarios: plasma etching equipment, chemical vapor deposition (CVD) systems, high-frequency power supply links, etc.

2. Stable control of RF system

Dynamic matching adjustment: The module can monitor RF parameters in real time, automatically adjust the matching status, adapt to process changes, and maintain stable system operation.

Preventing equipment damage: effectively avoiding reflected power backflow caused by impedance mismatch, protecting the RF power source and related components.

3. High frequency signal processing and transmission

Signal integrity assurance: Optimize the transmission path of RF signals to reduce signal distortion and interference.

Improving equipment performance: Enhancing the efficiency of RF systems, ensuring high repeatability and precision of processes.

4. Key RF components in industrial automation

Integrated application: As an indispensable RF module in semiconductor manufacturing equipment, it supports efficient collaboration of the overall automation control system.

Environmental adaptability: Designed to meet the requirements of high cleanliness and high stability environments, suitable for the complex process requirements of semiconductor manufacturing.

2.產(chǎn)      品      展      示      

3.其他產(chǎn)品

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ABB 1TGE120011R2200 電機(jī)饋線控制單元

ASEA E-31709機(jī)器人電路板

4.其他英文產(chǎn)品

KJ3222X1-BA1 Analog Input Module

1C31197G01 locator module

Siemens 6ES7307-1EA01-0AA0 power module

本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs

品牌：TEL Tokyo Electron

型號(hào)：5139-000072-31射頻匹配模塊

質(zhì)保：一年

成色：全新/二手

優(yōu)勢(shì)產(chǎn)品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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