Tokyo Electron 3M80-001588-12處理器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
產(chǎn)品名稱(chēng)
TEL Tokyo Electron 3M80-001588-12 處理器模塊
所屬設(shè)備
適用于 Tokyo Electron 半導(dǎo)體制造設(shè)備,特別是 SW300B 系統(tǒng)中的一部分。
模塊作用
該模塊屬于 AIO2(多功能輸入/輸出)子板,安裝于主控制板(如 32M81-023609-15)上,負(fù)責(zé):
數(shù)據(jù)采集與傳輸
控制邏輯處理
信號(hào)輸入/輸出協(xié)調(diào)
與其他子模塊協(xié)作完成系統(tǒng)控制任務(wù)
應(yīng)用領(lǐng)域
廣泛應(yīng)用于 Tokyo Electron 的刻蝕機(jī)、薄膜沉積設(shè)備、清洗系統(tǒng)等半導(dǎo)體前端工藝設(shè)備中,執(zhí)行以下任務(wù):
控制氣體流量、溫度、電壓、電流等參數(shù)
接收傳感器信號(hào)并傳輸至主控系統(tǒng)
控制執(zhí)行元件的邏輯行為(如真空閥、RF功率輸出等)
技術(shù)特性(推測(cè))
由于為專(zhuān)用模塊,未公開(kāi)詳細(xì)參數(shù),但一般具備以下特征:
高可靠性工業(yè)級(jí) PCB
配合主控板使用,不獨(dú)立運(yùn)行
具備一定防靜電、抗干擾能力
使用特定總線(xiàn)或?qū)S袇f(xié)議與系統(tǒng)通信
英文資料:
product name
TEL Tokyo Electron 3M80-001588-12 processor module
Belonging equipment
Suitable for Tokyo Electron semiconductor manufacturing equipment, especially as part of the SW300B system.
Module function
This module belongs to the AIO2 (Multi functional Input/Output) sub board and is installed on the main control board (such as 32M81-023609-15). It is responsible for:
Data collection and transmission
Control logic processing
Signal input/output coordination
Collaborate with other submodules to complete system control tasks
application area
Widely used in Tokyo Electron's etching machines, thin film deposition equipment, cleaning systems, and other semiconductor front-end process equipment to perform the following tasks:
Control gas flow rate, temperature, voltage, current and other parameters
Receive sensor signals and transmit them to the main control system
Control the logical behavior of executing components (such as vacuum valves, RF power output, etc.)
Technical characteristics (speculation)
Due to being a dedicated module, detailed parameters have not been disclosed, but it generally has the following characteristics:
High reliability industrial grade PCB
Used in conjunction with the main control board, not running independently
Having certain anti-static and anti-interference capabilities
Communicate with the system using a specific bus or proprietary protocol
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
GE VMIVME-5565-010000 332-015565-010000 P反光內(nèi)存模塊
4.其他英文產(chǎn)品
Gespac GESOUT-3 OUT-3B Controller Module
GE IS210AEBIH1BED interface card module
Kollmorgen MMC-SD-0.5-230-D servo drive
6ES5247-5AA31 | CACR-SR44BB1AMY114 | TRICONEX 3806E |
6ES5247-4UA31 | 6SC6140-0FE01 | 10106/2/1 |
6ES5246-5AA31 | CACR-IR-020202F | TRICONEX 3603B |
6ES5246-4UA41 | 6SC6110-6AA00 | TRICONEX 3623T |
6ES5244-5AA31 | CACR-HR02BAB12 | IC660BBD101 |
6ES52431BA11 | 6SC9811-4CH00 | VME-I064 101864 |
6ES5243-1AA13 | CACR-HR20BBC | TRICONEX 4508 |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng),轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs