Tokyo Electron 2184-020214-12數(shù)字量控制板卡 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 2184-020214-12 數(shù)字量控制板卡
(Digital I/O Control Board)
產(chǎn)品功能簡介:
該數(shù)字量控制板卡是 Tokyo Electron(TEL)半導體設備中的核心 I/O 控制模塊,用于管理與設備中各類數(shù)字信號的輸入與輸出,并協(xié)調傳感器、執(zhí)行器、開關等設備的邏輯控制。主要功能包括:
接收來自按鈕、開關、傳感器等外部設備的數(shù)字輸入信號
向電磁閥、繼電器、蜂鳴器、指示燈等輸出控制信號
支持多路數(shù)字量通道,具備高速、穩(wěn)定的數(shù)據(jù)處理能力
與主控系統(tǒng)或 PLC 通信,實現(xiàn)工藝流程中的自動控制邏輯
具備輸入濾波、輸出短路保護、狀態(tài)監(jiān)測等功能,提升系統(tǒng)安全性
主要應用領域:
1. 工藝流程控制與動作執(zhí)行
控制腔體門啟閉、載盤升降、氣閥切換、報警輸出等典型數(shù)字控制任務
接收設備狀態(tài)信號如傳感器觸發(fā)、到位信號、工藝準備完成等輸入
2. 設備聯(lián)鎖與安全控制
實現(xiàn)設備級別的安全聯(lián)鎖邏輯,例如真空未達禁止動作、門未關無法啟動等
管理急停、電源保護、運行/停止等關鍵操作條件
3. I/O 狀態(tài)監(jiān)測與調試支持
提供信號指示燈與在線監(jiān)測接口,便于故障診斷與維護
便于設備的工藝調試和控制系統(tǒng)聯(lián)調
英文資料:
TEL Tokyo Electron 2184-020214-12 Digital Control Board
(Digital I/O Control Board)
Product Function Introduction:
This digital control board is the core I/O control module in Tokyo Electron (TEL) semiconductor equipment, used to manage the input and output of various digital signals in the equipment, and coordinate the logic control of sensors, actuators, switches, and other devices. The main functions include:
Receive digital input signals from external devices such as buttons, switches, sensors, etc
Output control signals to solenoid valves, relays, buzzers, indicator lights, etc
Supports multiple digital channels with high-speed and stable data processing capabilities
Communicate with the main control system or PLC to achieve automatic control logic in the process flow
Equipped with input filtering, output short-circuit protection, status monitoring and other functions to enhance system safety
Main application areas:
1. Process control and action execution
Typical digital control tasks such as controlling the opening and closing of chamber doors, lifting and lowering of loading trays, switching of air valves, and alarm output
Receive device status signals such as sensor triggers, in place signals, process preparation completion, and other inputs
2. Equipment interlocking and safety control
Implement safety interlock logic at the device level, such as prohibiting actions when the vacuum is not reached, inability to start when the door is not closed, etc
Manage critical operating conditions such as emergency stop, power protection, operation/stop, etc
3. I/O status monitoring and debugging support
Provide signal indicator lights and online monitoring interfaces for easy fault diagnosis and maintenance
Facilitating the process debugging of equipment and the joint debugging of control systems
2.產(chǎn) 品 展 示
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