Tokyo Electron 2L39-000066-31溫度控制器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2L39-000066-31 溫度控制器
（Temperature Controller）
產(chǎn)品功能簡(jiǎn)介：
該溫度控制器是 Tokyo Electron（TEL）半導(dǎo)體制造設(shè)備中的關(guān)鍵控制單元，用于實(shí)現(xiàn)對(duì)設(shè)備內(nèi)部關(guān)鍵部件或工藝腔體的精準(zhǔn)溫度調(diào)節(jié)。主要功能包括：
采集熱電偶、熱阻（RTD）等溫度傳感器的信號(hào)
通過(guò) PID 控制算法實(shí)現(xiàn)加熱器或冷卻系統(tǒng)的精準(zhǔn)溫度調(diào)節(jié)
提供多段溫度設(shè)定與自動(dòng)切換功能，適應(yīng)復(fù)雜工藝需求
具備過(guò)溫報(bào)警、異常保護(hù)與故障診斷功能
支持與主控系統(tǒng)的通信接口，實(shí)現(xiàn)遠(yuǎn)程監(jiān)控與參數(shù)調(diào)整
主要應(yīng)用領(lǐng)域：
1. 半導(dǎo)體工藝腔體溫度控制
精準(zhǔn)控制 CVD、PVD、蝕刻等設(shè)備反應(yīng)腔內(nèi)的溫度環(huán)境
確保工藝過(guò)程的溫度穩(wěn)定性，提高產(chǎn)品良率
2. 晶圓處理設(shè)備加熱單元
管理晶圓平臺(tái)、對(duì)位臺(tái)、載具的加熱與溫度維護(hù)
控制預(yù)熱器、溫度均衡裝置的運(yùn)行狀態(tài)
3. 真空系統(tǒng)溫度管理
控制真空閥體、管路或密封件的溫度，防止結(jié)露或材料變形
確保系統(tǒng)運(yùn)行的環(huán)境安全與穩(wěn)定
英文資料：
TEL Tokyo Electron 2L39-00006-31 Temperature Controller
（Temperature Controller）
Product Function Introduction:
This temperature controller is a key control unit in Tokyo Electron (TEL) semiconductor manufacturing equipment, used to achieve precise temperature regulation of key components or process chambers inside the equipment. The main functions include:
Collect signals from temperature sensors such as thermocouples and thermal resistance detectors (RTDs)
Accurate temperature regulation of heaters or cooling systems through PID control algorithm
Provide multiple temperature settings and automatic switching functions to meet complex process requirements
Equipped with over temperature alarm, abnormal protection, and fault diagnosis functions
Support communication interface with the main control system to achieve remote monitoring and parameter adjustment
Main application areas:
1. Temperature control of semiconductor process chamber
Accurately control the temperature environment inside the reaction chamber of CVD, PVD, etching and other equipment
Ensure temperature stability during the manufacturing process and improve product yield
2. Heating unit of wafer processing equipment
Manage the heating and temperature maintenance of wafer platforms, alignment stations, and carriers
Control the operation status of preheater and temperature balance device
3. Temperature management of vacuum system
Control the temperature of vacuum valve bodies, pipelines, or seals to prevent condensation or material deformation
Ensure the safety and stability of the system's operating environment
2.產(chǎn) 品 展 示
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