Tokyo Electron 3M81-024340-14驅(qū)動(dòng)器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M81-024340-14 驅(qū)動(dòng)器模塊
（Driver Module）
產(chǎn)品功能簡(jiǎn)介：
3M81-024340-14 驅(qū)動(dòng)器模塊 是 Tokyo Electron（TEL）半導(dǎo)體設(shè)備中用于驅(qū)動(dòng)電機(jī)、執(zhí)行器或其他負(fù)載的關(guān)鍵模塊。它主要承擔(dān)電力輸出與控制邏輯執(zhí)行的雙重作用，在設(shè)備自動(dòng)化系統(tǒng)中屬于動(dòng)作執(zhí)行層的核心部件。
主要功能包括：
為步進(jìn)電機(jī)、伺服電機(jī)或其他電動(dòng)執(zhí)行單元提供驅(qū)動(dòng)電流與控制脈沖
接收來(lái)自控制器（如 PLC 或主控板）的信號(hào)，執(zhí)行啟停、轉(zhuǎn)速、方向控制
實(shí)現(xiàn)高精度定位控制，支持加減速曲線與回零邏輯
內(nèi)置過(guò)流、過(guò)壓、過(guò)溫保護(hù)，保障設(shè)備穩(wěn)定運(yùn)行
與運(yùn)動(dòng)控制系統(tǒng)或 I/O 系統(tǒng)協(xié)同實(shí)現(xiàn)自動(dòng)化工藝流程
主要應(yīng)用領(lǐng)域：
1. 晶圓搬運(yùn)與對(duì)位系統(tǒng)
驅(qū)動(dòng)晶圓搬運(yùn)手臂、升降機(jī)構(gòu)、旋轉(zhuǎn)臺(tái)等關(guān)鍵部件
保證晶圓在不同模塊（如 EFEM、Load Port、腔體）之間的準(zhǔn)確傳輸和定位
2. 精密運(yùn)動(dòng)控制系統(tǒng)
在 TEL Etcher、CVD、PVD 等設(shè)備中，驅(qū)動(dòng)氣缸、導(dǎo)軌、電動(dòng)滑臺(tái)實(shí)現(xiàn)流程動(dòng)作
用于載盤機(jī)構(gòu)、裝載機(jī)構(gòu)、門控機(jī)構(gòu)的自動(dòng)驅(qū)動(dòng)控制
3. 真空與氣體控制設(shè)備
控制真空閥門的啟閉動(dòng)作
驅(qū)動(dòng)壓力調(diào)節(jié)單元中的微電機(jī)或線性執(zhí)行器
英文資料：
TEL Tokyo Electron 3M81-024340-14 Driver Module
（Driver Module）
Product Function Introduction:
The 3M81-024340-14 driver module is a critical module used in Tokyo Electron (TEL) semiconductor equipment to drive motors, actuators, or other loads. It mainly plays a dual role in power output and control logic execution, and is a core component of the action execution layer in equipment automation systems.
The main functions include:
Provide driving current and control pulses for stepper motors, servo motors, or other electric execution units
Receive signals from controllers (such as PLCs or main control boards) to perform start stop, speed, and direction control
Realize high-precision positioning control, support acceleration and deceleration curves and zero return logic
Built in overcurrent, overvoltage, and overtemperature protection to ensure stable operation of the equipment
Collaborate with motion control systems or I/O systems to achieve automated process flow
Main application areas:
1. Wafer handling and alignment system
Drive key components such as wafer handling arms, lifting mechanisms, and rotating tables
Ensure accurate transfer and positioning of wafers between different modules (such as EFEM, load ports, chambers)
2. Precision motion control system
In TEL Etcher, CVD, PVD and other equipment, the driving cylinder, guide rail, and electric slide table are used to achieve process actions
Automatic drive control for loading mechanisms, loading mechanisms, and door control mechanisms
3. Vacuum and gas control equipment
Control the opening and closing action of the vacuum valve
Micro motors or linear actuators in the driving pressure regulating unit
2.產(chǎn) 品 展 示
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| 710-303063-00 | 6DD1684-0EA0 | F31X133PRUAPG1 |
| 710-302407-00 | 03-10484-00 | F31X118CCAACG1 |
| 70-28255-01 | 03-290206-00 | 700-733242-001 |
| 700-661726-00 | 02-00072-00 | 710-450320-00 |
| 700-659846-00 | 531X111PSHANG3 | F31X133PRUALG1 |
| 700-212470-000 | 331X232ACG | 0033799-000 |
| 6RY1703-0DA02 | 531X111PSHAMG3 | F31X135PRGBEG1 |
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