Tokyo Electron 3M10-151466-11控制器組件 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3M10-151466-11 控制器組件
(Controller Assembly)
產(chǎn)品功能簡介:
該控制器組件是 TEL(Tokyo Electron)用于半導體設備中的模塊化控制核心單元,集成了主控電路、通信接口和執(zhí)行信號邏輯,承擔設備運行過程中的指令處理和設備動作控制任務。
其典型功能包括:
管理晶圓傳輸、工藝處理、真空操作等子系統(tǒng)的控制流程
實時采集傳感器輸入(如溫度、壓力、位置)并做出邏輯判斷
驅(qū)動電機、閥門、加熱單元等執(zhí)行裝置
與主控平臺(如 SBC 或 PLC)進行高速通信并同步狀態(tài)
提供接口板、繼電器、電源模塊等組件的一體化結(jié)構(gòu),便于安裝和維護
可能集成功能模塊:
微控制器或工業(yè) CPU
數(shù)字量輸入/輸出(DI/DO)接口
模擬量信號采集(AI)
通信模塊(如 CAN、RS-232/485、Ethernet)
故障檢測與報警電路
EMI/ESD 電氣保護結(jié)構(gòu)
英文資料:
TEL Tokyo Electron 3M10-151466-11 Controller Component
(Controller Assembly)
Product Function Introduction:
This controller component is a modular control core unit used by TEL (Tokyo Electron) in semiconductor devices, integrating main control circuits, communication interfaces, and execution signal logic, responsible for instruction processing and device action control tasks during device operation.
Its typical functions include:
Manage the control process of subsystems such as wafer transfer, process handling, vacuum operation, etc
Real time collection of sensor inputs (such as temperature, pressure, position) and making logical judgments
Execution devices such as drive motors, valves, heating units, etc
High speed communication and status synchronization with the main control platform (such as SBC or PLC)
Provide an integrated structure of interface boards, relays, power modules, and other components for easy installation and maintenance
Possible integrated functional modules:
Microcontrollers or industrial CPUs
Digital input/output (DI/DO) interface
Analog signal acquisition (AI)
Communication modules (such as CAN, RS-232/485, Ethernet)
Fault detection and alarm circuit
EMI/ESD electrical protection structure
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
ASEA YB161102-AK Robot Computer Board
710-658956-00 | 8005-PR-4 | 4136J57-G01 |
710-658909-001 | 8005-NLU-10 | 4136J56-G01 |
710-658669-00 | 8005-MP-24 | 4136J54G4 |
710-658363-20 | 8005-LTV-101 | 4136J56-G1 |
710-658340-20 | 8005-LTC-101 | 8030-DLM-110 |
710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
本篇文章出自瑞昌明盛自動化設備有限公司官網(wǎng),轉(zhuǎn)載請附上此鏈接:http://www.jiangxidcs