Tokyo Electron 3M81-024341-12印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3M81-024341-12 印刷電路板
(Printed Circuit Board)
產(chǎn)品功能概述:
該P(yáng)CB板是Tokyo Electron半導(dǎo)體設(shè)備中的關(guān)鍵電子組件,通常用于:
支持設(shè)備內(nèi)部控制信號(hào)傳輸
連接傳感器、執(zhí)行器和主控模塊
實(shí)現(xiàn)電路間的數(shù)據(jù)與電源分配
保障設(shè)備控制邏輯和信號(hào)完整性
主要應(yīng)用領(lǐng)域:
半導(dǎo)體制造設(shè)備內(nèi)部控制
用于蝕刻機(jī)(Etcher)、沉積設(shè)備(CVD/PVD)等設(shè)備中的控制與信號(hào)處理。
I/O接口與信號(hào)分配
作為輸入輸出信號(hào)的連接平臺(tái),管理多個(gè)傳感器和驅(qū)動(dòng)信號(hào)。
機(jī)械動(dòng)作控制
支持晶圓搬運(yùn)系統(tǒng)中電機(jī)和執(zhí)行機(jī)構(gòu)的信號(hào)控制與反饋。
設(shè)備狀態(tài)監(jiān)測(cè)
傳遞溫度、壓力、位置等傳感器信號(hào),實(shí)現(xiàn)過(guò)程監(jiān)控。
典型設(shè)備:
Tokyo Electron 蝕刻機(jī)
化學(xué)氣相沉積設(shè)備
晶圓傳輸與搬運(yùn)系統(tǒng)
英文資料:
TEL Tokyo Electron 3M81-024341-12 Printed Circuit Board
(Printed Circuit Board)
Product Function Overview:
This PCB board is a critical electronic component in Tokyo Electron semiconductor equipment, typically used for:
Support internal control signal transmission of devices
Connect sensors, actuators, and main control modules
Realize data and power distribution between circuits
Ensure the integrity of equipment control logic and signals
Main application areas:
Internal Control of Semiconductor Manufacturing Equipment
Used for control and signal processing in etching machines (Etcher), deposition equipment (CVD/PVD), and other devices.
I/O interface and signal allocation
As a connection platform for input and output signals, it manages multiple sensors and drive signals.
Mechanical motion control
Support signal control and feedback for motors and actuators in wafer handling systems.
Equipment status monitoring
Transmit sensor signals such as temperature, pressure, and position to achieve process monitoring.
Typical equipment:
Tokyo Electron Etching Machine
Chemical vapor deposition equipment
Wafer Transfer and Handling System
2.產(chǎn) 品 展 示
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