Tokyo Electron 3380-007053-13單板計算機 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3380-007053-13 單板計算機
(Single Board Computer, SBC)
產(chǎn)品功能:
該單板計算機是 Tokyo Electron 半導體設備中的核心計算與控制平臺,集成了處理器、內存、存儲、輸入輸出接口于一體,主要功能包括:
運行設備控制系統(tǒng)的軟件與固件,實現(xiàn)工藝流程管理
采集、處理設備傳感器數(shù)據(jù),實現(xiàn)閉環(huán)控制
負責與設備各子模塊(I/O 板、驅動模塊、傳感器模塊等)通信協(xié)調
提供網(wǎng)絡接口,實現(xiàn)與上位機系統(tǒng)或工廠制造執(zhí)行系統(tǒng)(MES)交互
支持實時操作系統(tǒng)(RTOS)或嵌入式 Linux 等操作環(huán)境
主要應用領域:
1. 半導體制造設備核心控制
作為 Etcher、CVD、PVD 等設備的主控平臺
控制工藝參數(shù)、設備動作、數(shù)據(jù)采集與記錄
2. 自動化與流程管理
執(zhí)行設備動作序列與工藝流程邏輯
支持設備自診斷、故障處理與報警管理
3. 數(shù)據(jù)通信與網(wǎng)絡接口
與工廠自動化系統(tǒng)、制造執(zhí)行系統(tǒng)(MES)進行數(shù)據(jù)交換
支持工業(yè)以太網(wǎng)、串口、CAN 總線等多種通信協(xié)議
4. 設備狀態(tài)監(jiān)控與優(yōu)化
實時監(jiān)控設備運行狀況,支持遠程維護與升級
提供系統(tǒng)日志、歷史數(shù)據(jù)存儲與分析接口
英文資料:
TEL Tokyo Electron 3380-007053-13 Single Board Computer
(Single Board Computer, SBC)
Product Features:
This single board computer is the core computing and control platform in Tokyo Electron semiconductor equipment, integrating a processor, memory, storage, and input/output interfaces. Its main functions include:
Run the software and firmware of the equipment control system to achieve process management
Collect and process device sensor data to achieve closed-loop control
Responsible for communication and coordination with various sub modules of the equipment (I/O board, driver module, sensor module, etc.)
Provide network interfaces to enable interaction with upper computer systems or factory manufacturing execution systems (MES)
Support real-time operating systems (RTOS) or embedded Linux and other operating environments
Main application areas:
1. Core control of semiconductor manufacturing equipment
As the main control platform for Etcher, CVD, PVD and other equipment
Control process parameters, equipment actions, data collection and recording
2. Automation and Process Management
Execute device action sequence and process logic
Support device self diagnosis, fault handling, and alarm management
3. Data communication and network interface
Exchange data with factory automation systems and manufacturing execution systems (MES)
Supports multiple communication protocols such as industrial Ethernet, serial port, CAN bus, etc
4. Equipment status monitoring and optimization
Real time monitoring of device operation status, supporting remote maintenance and upgrades
Provide system logs, historical data storage and analysis interfaces
2.產(chǎn) 品 展 示
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