Tokyo Electron 3208-000029-12電源模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3208-000029-12 電源模塊
(Power Supply Module)
產(chǎn)品類型與功能:
該模塊是 Tokyo Electron 半導體設(shè)備中的專用電源模塊,主要職責是為設(shè)備的控制電路、執(zhí)行機構(gòu)、傳感系統(tǒng)等提供穩(wěn)定的直流/交流電源輸出,具備以下功能特點:
電壓轉(zhuǎn)換(如 AC-DC,DC-DC)
電源濾波與穩(wěn)壓,確保輸出電壓穩(wěn)定性
提供短路、過流、過壓等保護機制
某些版本可能支持多路輸出供電
主要應用領(lǐng)域:
1. 半導體制造設(shè)備供電系統(tǒng)
為蝕刻(Etcher)、沉積(CVD/PVD)、光刻(Lithography)等工藝模塊供電
提供主控板、I/O模塊、傳感器、執(zhí)行器等的低壓直流供電(如+5V、+12V、+24V)
2. 控制系統(tǒng)電源核心
作為 TEL 設(shè)備內(nèi)部 PLC、主控制器、電機驅(qū)動器等關(guān)鍵模塊的核心電源來源
支持長時間穩(wěn)定運行,適配高精度制造要求
3. 通信與接口電源保障
供電給 RS-232/RS-485 接口、光電隔離模塊、網(wǎng)絡(luò)通信模塊
保證系統(tǒng)數(shù)據(jù)傳輸不受電源波動干擾
4. 真空系統(tǒng)與執(zhí)行機構(gòu)支持
為真空泵控制電路、MFC(質(zhì)量流量控制器)、電磁閥等外設(shè)供電
具備抗干擾能力和高可靠性
英文資料:
TEL Tokyo Electron 3208-000029-12 power module
(Power Supply Module)
Product type and function:
This module is a dedicated power module in Tokyo Electron semiconductor equipment, mainly responsible for providing stable DC/AC power output for the control circuit, actuator, sensing system, etc. of the equipment. It has the following functional characteristics:
Voltage conversion (such as AC-DC, DC-DC)
Power filtering and voltage stabilization to ensure output voltage stability
Provide protection mechanisms for short circuits, overcurrent, overvoltage, etc
Some versions may support multiple output power supply
Main application areas:
1. Power supply system for semiconductor manufacturing equipment
Power supply for process modules such as Etcher, CVD/PVD, Lithography, etc
Provide low-voltage DC power supply (such as+5V,+12V,+24V) for the main control board, I/O modules, sensors, actuators, etc
2. Control system power core
As the core power source for key modules such as PLC, main controller, and motor driver inside TEL equipment
Support long-term stable operation and adapt to high-precision manufacturing requirements
3. Communication and interface power supply guarantee
Power supply to RS-232/RS-485 interface, optoelectronic isolation module, and network communication module
Ensure that system data transmission is not affected by power fluctuations
4. Vacuum system and actuator support
Power supply for external devices such as vacuum pump control circuit, MFC (Mass Flow Controller), solenoid valve, etc
Capable of anti-interference and high reliability
2.產(chǎn) 品 展 示
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