Tokyo Electron 3M81-024341-14終端模塊 PDF資料
1.產 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M81-024341-14 終端模塊
（Terminal Module）
產品類型與作用：
該模塊屬于 Tokyo Electron 半導體設備系統(tǒng)中的電氣連接終端單元，用于多路信號或電源線的集中接入、分配與終端管理，功能包括：
提供連接點：用于外部設備/傳感器/執(zhí)行器接入系統(tǒng)內部
信號終端：對模擬、數(shù)字、通信等信號進行中繼或終止
接線整理：統(tǒng)一信號線/電源線的分布和編號，提升維護效率
電氣保護：部分終端模塊帶有簡單防雷、限流或隔離功能
主要應用領域：
1. 晶圓處理與搬運系統(tǒng)
為晶圓裝載單元、機械臂、真空閥等提供電源及控制信號接入。
集中連接各類傳感器，如位置檢測、溫度檢測、真空狀態(tài)等。
2. 設備內I/O分配與接線管理
用作 TEL 控制系統(tǒng)中 I/O 板卡的接線終端。
通過終端模塊統(tǒng)一輸出信號到多個執(zhí)行器或外設。
3. 電源/控制信號布線終端
將控制器輸出的低壓/中壓電源或信號線整理至機架末端或分布單元。
有助于減少干擾和信號衰減，改善布線環(huán)境。
4. 接口標準化與調試便利性
便于工程人員快速接入測試工具或替換模塊。
對系統(tǒng)進行模塊化管理，提升生產線維護效率。
英文資料：
TEL Tokyo Electron 3M81-024341-14 Terminal Module
（Terminal Module）
Product type and function:
This module belongs to the electrical connection terminal unit in the Tokyo Electron semiconductor equipment system, used for centralized access, distribution, and terminal management of multiple signals or power lines. Its functions include:
Provide connection points: for external devices/sensors/actuators to access the internal system
Signal terminal: relay or terminate analog, digital, communication and other signals
Wiring arrangement: Unify the distribution and numbering of signal/power lines to improve maintenance efficiency
Electrical protection: Some terminal modules have simple lightning protection, current limiting or isolation functions
Main application areas:
1. Wafer processing and handling system
Provide power and control signal access for wafer loading units, robotic arms, vacuum valves, etc.
Centralize the connection of various sensors, such as position detection, temperature detection, vacuum status, etc.
2. I/O allocation and wiring management within the device
Used as a wiring terminal for I/O boards in TEL control systems.
Output signals uniformly to multiple actuators or peripherals through terminal modules.
3. Power/control signal wiring terminals
Organize the low/medium voltage power or signal lines output by the controller to the end of the rack or distribution unit.
Helps to reduce interference and signal attenuation, and improve the wiring environment.
4. Interface standardization and debugging convenience
Easy for engineering personnel to quickly access testing tools or replace modules.
Modular management of the system to improve production line maintenance efficiency.
2.產 品 展 示
3.其他產品
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