Tokyo Electron 3D39-000002-V4接口盒 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D39-000002-V4 接口盒
（Interface Box）
產(chǎn)品定義與作用：
該接口盒是用于 Tokyo Electron 半導(dǎo)體設(shè)備內(nèi)部的信號(hào)中轉(zhuǎn)、接線管理和電氣隔離的模塊單元，一般集成于系統(tǒng)控制架構(gòu)中，作用如下：
提供多路輸入/輸出信號(hào)的接線端子或連接口
實(shí)現(xiàn)設(shè)備控制系統(tǒng)與現(xiàn)場(chǎng)傳感器、執(zhí)行器之間的物理連接
起到信號(hào)路由、保護(hù)、電源分配等作用
某些型號(hào)具備屏蔽、濾波、EMI 保護(hù)功能
主要應(yīng)用領(lǐng)域：
1. 信號(hào)集線與轉(zhuǎn)接
將多個(gè) I/O 信號(hào)從主控制器或 I/O 板引出，通過接口盒集中分配到不同功能模塊。
實(shí)現(xiàn)模塊化布線，簡(jiǎn)化設(shè)備維護(hù)和升級(jí)操作。
2. 晶圓處理系統(tǒng)配套
用于晶圓搬運(yùn)機(jī)器人、對(duì)位單元、升降平臺(tái)、真空門等設(shè)備與控制系統(tǒng)間的接口橋接。
提供清晰標(biāo)識(shí)的接線端子或工業(yè)連接器。
3. 電氣隔離與保護(hù)
對(duì)于模擬信號(hào)、數(shù)字信號(hào)、電源線進(jìn)行有效隔離與組織。
防止靜電放電（ESD）或電磁干擾（EMI）對(duì)控制系統(tǒng)造成損害。
4. 調(diào)試與故障排查接口
便于維護(hù)人員通過接口盒快速測(cè)試信號(hào)通斷或測(cè)量電壓/電流值。
部分接口盒帶有指示燈、保險(xiǎn)絲或可替換模塊，用于現(xiàn)場(chǎng)排障。
英文資料：
TEL Tokyo Electron 3D39-000002-V4 Interface Box
（Interface Box）
Product Definition and Function:
This interface box is a module unit used for signal transfer, wiring management, and electrical isolation within Tokyo Electron semiconductor equipment. It is generally integrated into the system control architecture and serves the following purposes:
Provide wiring terminals or ports for multiple input/output signals
Establish physical connections between equipment control systems and on-site sensors and actuators
Plays a role in signal routing, protection, power distribution, etc
Some models have shielding, filtering, and EMI protection functions
Main application areas:
1. Signal consolidation and conversion
Extract multiple I/O signals from the main controller or I/O board and distribute them to different functional modules through interface boxes.
Implement modular wiring to simplify equipment maintenance and upgrade operations.
2. Supporting wafer processing system
Used for interface bridging between wafer handling robots, alignment units, lifting platforms, vacuum doors, and control systems.
Provide clearly labeled wiring terminals or industrial connectors.
3. Electrical isolation and protection
Effectively isolate and organize analog signals, digital signals, and power lines.
Prevent damage to the control system caused by electrostatic discharge (ESD) or electromagnetic interference (EMI).
4. Debugging and troubleshooting interface
Easy for maintenance personnel to quickly test signal continuity or measure voltage/current values through the interface box.
Some interface boxes are equipped with indicator lights, fuses, or replaceable modules for on-site troubleshooting.
2.產(chǎn) 品 展 示
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