Tokyo Electron 3M81-001116-12電機(jī)單元分布板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M81-001116-12 電機(jī)單元分布板
（Motor Unit Distribution Board）
產(chǎn)品功能：
該電路板作為電機(jī)控制系統(tǒng)中的分布式連接和信號(hào)管理模塊，主要負(fù)責(zé)：
電機(jī)控制信號(hào)的接收與分發(fā)
驅(qū)動(dòng)單元的功率與反饋接口連接
電機(jī)狀態(tài)監(jiān)測信號(hào)匯總
電流、電壓等運(yùn)行參數(shù)的數(shù)據(jù)分配與中繼傳輸
主要應(yīng)用領(lǐng)域：
1. 晶圓搬運(yùn)系統(tǒng)
適用于晶圓傳輸模塊（Wafer Transfer Module）中的多個(gè)電機(jī)控制，如機(jī)械臂、滑臺(tái)、升降軸。
管理多軸電機(jī)運(yùn)行狀態(tài)，實(shí)現(xiàn)同步或順序控制。
2. 自動(dòng)對(duì)位與調(diào)節(jié)平臺(tái)
與步進(jìn)電機(jī)/伺服電機(jī)配合，用于執(zhí)行精密位移操作。
支持 XY 平臺(tái)、Z 軸升降、旋轉(zhuǎn)軸等控制通道的分配。
3. 設(shè)備內(nèi)部多電機(jī)系統(tǒng)管理
管理多個(gè)電機(jī)的分布式連接，統(tǒng)一供電與信號(hào)接口。
提供電源隔離、接口保護(hù)、電機(jī)聯(lián)鎖等功能。
4. 真空腔體內(nèi)執(zhí)行機(jī)構(gòu)驅(qū)動(dòng)
控制腔體內(nèi)真空閥門驅(qū)動(dòng)器、升降平臺(tái)、傳送滑軌等部件。
具備抗干擾與高可靠性信號(hào)傳輸能力。
英文資料：
TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board
（Motor Unit Distribution Board）
Product Features:
This circuit board serves as a distributed connection and signal management module in the motor control system, mainly responsible for:
Reception and distribution of motor control signals
Power and feedback interface connection of the driving unit
Summary of motor status monitoring signals
Data allocation and relay transmission of operating parameters such as current and voltage
Main application areas:
1. Wafer handling system
Suitable for controlling multiple motors in wafer transfer modules, such as robotic arms, slide tables, and lifting shafts.
Manage the operation status of multi axis motors to achieve synchronous or sequential control.
2. Automatic alignment and adjustment platform
Used in conjunction with stepper motors/servo motors to perform precise displacement operations.
Support the allocation of control channels such as XY platform, Z-axis lifting, and rotation axis.
3. Internal multi motor system management of equipment
Manage distributed connections of multiple motors and unify power supply and signal interfaces.
Provide functions such as power isolation, interface protection, and motor interlocking.
4. Drive the actuator inside the vacuum chamber
Control the vacuum valve driver, lifting platform, conveyor slide and other components inside the chamber.
Capable of anti-interference and high reliability signal transmission.
2.產(chǎn) 品 展 示
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