Tokyo Electron DS1181-000957-11接口面板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron DS1181-000957-11 接口面板簡(jiǎn)介
一、基本信息
型號(hào):DS1181-000957-11
別名:MC-31027
類(lèi)型:PHOTO MOS接口板
制造商:Tokyo Electron Ltd.(TEL)
應(yīng)用設(shè)備:主要用于TEL Alpha 8se/a8s系列爐體(Furnace)
二、功能描述
信號(hào)控制
負(fù)責(zé)控制設(shè)備中的閥門(mén)(Valve)和質(zhì)量流量控制器(MFC)的信號(hào)傳輸,確保流體和氣體的準(zhǔn)確調(diào)節(jié)。接口轉(zhuǎn)換
作為電子控制信號(hào)的接口面板,實(shí)現(xiàn)上位控制系統(tǒng)與執(zhí)行器之間的信號(hào)連接和轉(zhuǎn)換。系統(tǒng)集成
集成于半導(dǎo)體制造設(shè)備的自動(dòng)控制系統(tǒng),支持設(shè)備的精確工藝控制。
三、應(yīng)用場(chǎng)景
半導(dǎo)體制造設(shè)備中的閥門(mén)及氣體流量控制系統(tǒng)
設(shè)備維修及備件替換
工藝流程自動(dòng)化及穩(wěn)定性提升
英文資料:
Introduction to TEL Tokyo Electron DS1181-000957-11 Interface Panel
1、 Basic Information
Model: DS1181-000957-11
Nickname: MC-31027
Type: PHOTO MOS interface board
Manufacturer: Tokyo Electron Ltd. (TEL)
Application equipment: mainly used for TEL Alpha 8se/a8s series furnaces
2、 Function Description
Signal Control
Responsible for controlling the signal transmission of valves and mass flow controllers (MFCs) in the equipment, ensuring accurate regulation of fluids and gases.
Interface conversion
As an interface panel for electronic control signals, it enables signal connection and conversion between the upper control system and actuators.
system integration
The automatic control system integrated into semiconductor manufacturing equipment supports precise process control of the equipment.
3、 Application scenarios
Valves and gas flow control systems in semiconductor manufacturing equipment
Equipment maintenance and spare parts replacement
Process automation and stability improvement
2.產(chǎn) 品 展 示
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