Tokyo Electron 1B80-002830-11輸入/輸出擴展板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 1B80-002830-11 輸入/輸出擴展板簡介
一、基本信息
型號: 1B80-002830-11
名稱: 輸入/輸出擴展板(POU Add-On Board)
制造商: Tokyo Electron Ltd.(TEL)
應用范圍: 用于半導體制造設備中,擴展I/O通道的模塊
二、功能描述
擴展I/O通道
該擴展板提供額外的輸入和輸出接口,用以增加設備的控制和監(jiān)測能力。模塊化集成
設計為附加模塊,可方便地插入主控制系統(tǒng),支持設備功能靈活擴展。系統(tǒng)兼容性
與TEL現(xiàn)有控制系統(tǒng)及Meiden系列系統(tǒng)兼容,保證穩(wěn)定運行。
三、典型應用
用于CVD、Etcher、Coater/Developer等半導體設備的I/O信號擴展。
適合設備升級改造,增加更多輸入/輸出點。
作為維修替換備件,保障設備長期穩(wěn)定運行。
四、注意事項
確認擴展板與主控制系統(tǒng)接口匹配,避免安裝不兼容導致故障。
按照設備說明書正確安裝,避免損壞電路板。
定期檢查擴展板的連接狀態(tài)和信號質(zhì)量,保證設備控制穩(wěn)定。
英文資料:
Introduction to TEL Tokyo Electron 1B80-002830-11 Input/Output Expansion Board
1、 Basic Information
Model: 1B80-002830-11
Name: POU Add On Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Application scope: Used as a module for expanding I/O channels in semiconductor manufacturing equipment
2、 Function Description
Expand I/O channels
This expansion board provides additional input and output interfaces to increase the control and monitoring capabilities of the device.
Modular integration
Designed as an additional module, it can be easily inserted into the main control system and supports flexible expansion of device functions.
system compatibility
Compatible with TEL's existing control system and Meiden series system to ensure stable operation.
3、 Typical applications
Used for I/O signal expansion of semiconductor devices such as CVD, Etcher, Coater/Developer, etc.
Suitable for equipment upgrade and renovation, adding more input/output points.
As a replacement spare part for maintenance, it ensures the long-term stable operation of the equipment.
4、 Precautions
Confirm that the expansion board is compatible with the main control system interface to avoid installation incompatibility causing malfunctions.
Install correctly according to the equipment manual to avoid damaging the circuit board.
Regularly check the connection status and signal quality of the expansion board to ensure stable device control.
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