Tokyo Electron 2L81-050035-11接口模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 2L81-050035-11 接口模塊簡(jiǎn)介
產(chǎn)品型號(hào): 2L81-050035-11
產(chǎn)品名稱: 接口模塊(Interface Module)
制造商: Tokyo Electron Ltd.(TEL)
適用設(shè)備: 用于TEL的半導(dǎo)體制造設(shè)備,如CVD、Etcher、Coater/Developer等系統(tǒng)中
一、核心功能
信號(hào)轉(zhuǎn)接與中繼
用于連接設(shè)備內(nèi)部各功能模塊,如控制板、I/O模塊、傳感器與執(zhí)行器,完成信號(hào)中轉(zhuǎn)、放大或匹配。通信適配
將不同通信協(xié)議或信號(hào)標(biāo)準(zhǔn)進(jìn)行協(xié)調(diào),如TTL與RS信號(hào)、電壓電平匹配等。模塊間聯(lián)通橋梁
連接主控制系統(tǒng)與子系統(tǒng),保證設(shè)備的模塊化協(xié)同運(yùn)行。電源或數(shù)據(jù)分配
分發(fā)低壓電源(如+5V、+12V)或分配數(shù)字信號(hào)給多個(gè)子通道。
二、應(yīng)用領(lǐng)域
工藝控制系統(tǒng):在反應(yīng)腔體溫控、氣體控制、泵閥控制等模塊中充當(dāng)控制信號(hào)橋梁。
I/O中轉(zhuǎn)中心:將來(lái)自現(xiàn)場(chǎng)設(shè)備的數(shù)字/模擬信號(hào)轉(zhuǎn)發(fā)至主控制單元。
通信接口擴(kuò)展:用于擴(kuò)展TEL設(shè)備的數(shù)據(jù)通信能力,支持多通道、多協(xié)議連接。
系統(tǒng)級(jí)信號(hào)集成:將多個(gè)子模塊集中統(tǒng)一接入系統(tǒng)主干結(jié)構(gòu),方便調(diào)試與維護(hù)。
三、產(chǎn)品特點(diǎn)(基于TEL接口模塊通用設(shè)計(jì))
高信號(hào)完整性、抗干擾能力強(qiáng)
模塊化標(biāo)準(zhǔn)尺寸,兼容TEL專用背板或機(jī)架系統(tǒng)
多針接口或排線連接,支持快速插拔
工業(yè)等級(jí)設(shè)計(jì),適用于潔凈室和高可靠性環(huán)境
支持熱插拔維護(hù),易于更換
英文資料:
Introduction to TEL Tokyo Electron 2L81-050035-11 Interface Module
Product model: 2L81-050035-11
Product Name: Interface Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Applicable equipment: Used in semiconductor manufacturing equipment for TEL, such as CVD, Etcher, Coater/Developer systems, etc
1、 Core functions
Signal transfer and relay
Used to connect various functional modules within the device, such as control boards, I/O modules, sensors, and actuators, to complete signal transfer, amplification, or matching.
Communication adaptation
Coordinate different communication protocols or signal standards, such as TTL and RS signals, voltage level matching, etc.
Connecting bridges between modules
Connect the main control system and subsystems to ensure modular and collaborative operation of the equipment.
Power or data distribution
Distribute low-voltage power supplies (such as+5V,+12V) or distribute digital signals to multiple sub channels.
2、 Application Fields
Process control system: acts as a control signal bridge in modules such as reaction chamber temperature control, gas control, pump valve control, etc.
I/O relay center: forwards digital/analog signals from on-site devices to the main control unit.
Communication interface extension: used to expand the data communication capabilities of TEL devices, supporting multi-channel and multi protocol connections.
System level signal integration: Centralize and unify multiple sub modules into the system backbone structure for easy debugging and maintenance.
3、 Product features (based on universal design of TEL interface module)
High signal integrity and strong anti-interference ability
Modular standard size, compatible with TEL dedicated backplane or rack systems
Multi pin interface or ribbon cable connection, supporting quick plugging and unplugging
Industrial grade design, suitable for clean rooms and high reliability environments
Support hot swappable maintenance, easy to replace
2.產(chǎn) 品 展 示
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