Tokyo Electron 2L81-050032-14傳感器模塊 PDF資料
1.產 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 2L81-050032-14 傳感器模塊 是一款專門用于半導體制造設備中的檢測與反饋單元,主要功能是采集設備運行狀態(tài)的各種物理量(如溫度、壓力、位置、氣體濃度等)并將信號傳輸給控制系統,確保設備工藝過程的精確控制和安全運行。
一、產品基本信息
型號: 2L81-050032-14
名稱: 傳感器模塊(Sensor Module)
制造商: Tokyo Electron Ltd.(TEL)
應用類別: 工藝參數檢測與信號采集模塊
二、核心功能
多類型傳感器集成
可能集成多種傳感器,如溫度傳感器(熱電偶/RTD)、壓力傳感器、氣體傳感器、位置開關等。
信號采集與轉換
將傳感器輸出的模擬或數字信號進行采集、處理并轉換為控制系統可識別的信號格式。
實時監(jiān)測與反饋
實時監(jiān)控關鍵工藝參數,支持設備自動調節(jié)和報警。
抗干擾設計
確保信號的準確性和穩(wěn)定性,減少環(huán)境噪聲影響。
英文資料:
The TEL Tokyo Electron 2L81-050032-14 sensor module is a detection and feedback unit specifically designed for semiconductor manufacturing equipment. Its main function is to collect various physical quantities of equipment operating status (such as temperature, pressure, position, gas concentration, etc.) and transmit signals to the control system to ensure precise control and safe operation of the equipment process.
1、 Basic Product Information
Model: 2L81-050032-14
Name: Sensor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Application category: Process parameter detection and signal acquisition module
2、 Core functions
Multi type sensor integration
Multiple sensors may be integrated, such as temperature sensors (thermocouples/RTDs), pressure sensors, gas sensors, position switches, etc.
Signal acquisition and conversion
Collect, process, and convert the analog or digital signals output by sensors into a signal format recognizable by the control system.
Real time monitoring and feedback
Real time monitoring of key process parameters, supporting automatic adjustment and alarm of equipment.
anti-interference design
Ensure the accuracy and stability of the signal, and reduce the impact of environmental noise.
2.產 品 展 示
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