Tokyo Electron 2L81-050213-16控制脈沖卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2L81-050213-16 控制脈沖卡件（Control Pulse Board / Pulse Control Module） 是用于 Tokyo Electron 半導(dǎo)體設(shè)備中的精密控制模塊，主要負(fù)責(zé)向執(zhí)行機(jī)構(gòu)輸出脈沖信號(hào)，用于控制伺服驅(qū)動(dòng)、步進(jìn)電機(jī)、閥門驅(qū)動(dòng)器或其他基于脈沖輸入的設(shè)備。該卡件多用于高精度定位與定時(shí)控制場(chǎng)合，在 TEL 的刻蝕、CVD、搬運(yùn)系統(tǒng)（EFEM）、涂膠顯影（Coater/Developer）等設(shè)備中扮演關(guān)鍵控制角色。
一、基本信息
產(chǎn)品型號(hào)： 2L81-050213-16
產(chǎn)品名稱： 控制脈沖卡件（Control Pulse Card / Pulse Output Board）
制造商： Tokyo Electron Ltd.（TEL）
模塊類型： 脈沖信號(hào)輸出控制板
安裝方式： 控制架構(gòu)中插板式安裝，連接主控系統(tǒng)（如 BX81/E244）
二、核心功能
脈沖輸出控制
輸出設(shè)定頻率、占空比、周期的脈沖信號(hào)；
用于驅(qū)動(dòng)步進(jìn)電機(jī)、脈沖型執(zhí)行器、光柵對(duì)位單元等。
高精度定時(shí)控制
可精確控制脈沖寬度與間隔，實(shí)現(xiàn)亞毫秒級(jí)控制精度；
多通道輸出支持多軸或多單元同步動(dòng)作。
響應(yīng)工藝邏輯信號(hào)
根據(jù)主控模塊的程序流程發(fā)出啟動(dòng)、停止、調(diào)速等脈沖指令；
可配合限位檢測(cè)、反饋信號(hào)實(shí)現(xiàn)閉環(huán)控制（與其他板卡聯(lián)動(dòng)）。
信號(hào)隔離與保護(hù)
通道隔離輸出，防止信號(hào)串?dāng)_；
具備過流、短路保護(hù)機(jī)制。
英文資料：
TEL Tokyo Electron 2L81-050213-16 Control Pulse Board/Pulse Control Module is a precision control module used in Tokyo Electron semiconductor equipment, mainly responsible for outputting pulse signals to actuators for controlling servo drives, stepper motors, valve drivers, or other pulse input based devices. This card is commonly used for high-precision positioning and timing control, in TEL etching CVD、 Plays a key control role in equipment such as EFEM and Coater/Developer.
1、 Basic Information
Product model: 2L81-050213-16
Product Name: Control Pulse Card/Pulse Output Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Pulse signal output control board
Installation method: Plug in installation in the control architecture, connected to the main control system (such as BX81/E244)
2、 Core functions
Pulse output control
Output pulse signals with set frequency, duty cycle, and period;
Used to drive stepper motors, pulse type actuators, grating alignment units, etc.
High precision timing control
Accurate control of pulse width and interval, achieving sub millisecond level control accuracy;
Multi channel output supports synchronous actions of multiple axes or units.
Responding to process logic signals
Send pulse commands such as start, stop, and speed control according to the program flow of the main control module;
Can be used in conjunction with limit detection and feedback signals to achieve closed-loop control (linked with other boards).
Signal isolation and protection
Channel isolation output to prevent signal crosstalk;
Equipped with overcurrent and short-circuit protection mechanisms.
2.產(chǎn) 品 展 示
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