Tokyo Electron 308-600223-4控制主板卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 308-600223-4 控制主板卡件（Main Control Board / Controller Card） 是一款用于半導(dǎo)體制造設(shè)備中的核心控制單元，通常部署在 Tokyo Electron（TEL）設(shè)備的主控系統(tǒng)內(nèi)部，作為系統(tǒng)運(yùn)行的指令處理中心之一。它負(fù)責(zé)協(xié)調(diào)信號(hào)輸入輸出、執(zhí)行邏輯控制流程，并與上位管理系統(tǒng)及其他功能模塊進(jìn)行高速通信。
一、基本信息
產(chǎn)品型號(hào)： 308-600223-4
產(chǎn)品名稱： 控制主板卡件（Control Main Board / Controller PCB）
制造商： Tokyo Electron Ltd.（TEL）
所屬設(shè)備平臺(tái)： TEL Etch / CVD / Coater / Developer / EFEM 系列
模塊類型： 嵌入式控制處理板卡
二、主要功能
工藝流程控制
執(zhí)行設(shè)備的自動(dòng)控制邏輯程序；
管理腔體、溫控、閥門、電源等工藝子系統(tǒng)的運(yùn)行序列。
數(shù)據(jù)處理與通信
接收和處理來自 I/O 板卡、傳感器的實(shí)時(shí)數(shù)據(jù)；
與 TEL 系統(tǒng)主干控制網(wǎng)絡(luò)或上位 MES/HMI 進(jìn)行高速通信。
聯(lián)動(dòng)與安全控制
實(shí)現(xiàn)設(shè)備安全聯(lián)鎖控制（如開門保護(hù)、真空聯(lián)鎖等）；
提供故障報(bào)警和狀態(tài)反饋機(jī)制。
模塊間協(xié)調(diào)管理
協(xié)調(diào)多個(gè)功能模塊如伺服控制板、電源分配板、接口模塊的同步運(yùn)行；
控制信號(hào)路由與輸出到下游執(zhí)行單元。
英文資料：
TEL Tokyo Electron 308-600223-4 Main Control Board/Controller Card is a core control unit used in semiconductor manufacturing equipment, typically deployed within the main control system of Tokyo Electron (TEL) devices as one of the instruction processing centers for system operation. It is responsible for coordinating signal input and output, executing logical control processes, and performing high-speed communication with the upper management system and other functional modules.
1、 Basic Information
Product model: 308-600223-4
Product Name: Control Main Board/Controller PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
Equipment platform: TEL Etch/CVD/Coater/Developer/EFEM series
Module Type: Embedded Control Processing Board
2、 Main functions
Process control
Execute the automatic control logic program of the device;
Manage the operational sequence of process subsystems such as chambers, temperature control, valves, and power supply.
Data Processing and Communication
Receive and process real-time data from I/O boards and sensors;
High speed communication with TEL system backbone control network or upper MES/HMI.
Linkage and safety control
Implement equipment safety interlock control (such as door opening protection, vacuum interlock, etc.);
Provide fault alarm and status feedback mechanism.
Coordination and management between modules
Coordinate the synchronous operation of multiple functional modules such as servo control board, power distribution board, and interface module;
Route and output control signals to downstream execution units.
2.產(chǎn) 品 展 示
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