Tokyo Electron E244-00048-21單板計算機 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron E244-00048-21 單板計算機(Single Board Computer, SBC) 是 Tokyo Electron 半導體設(shè)備控制系統(tǒng)中的核心處理單元之一,主要負責執(zhí)行工藝控制邏輯、通信管理、人機界面(HMI)處理及系統(tǒng)運行指令的下達。它是 E244 系列控制架構(gòu)中的關(guān)鍵部件,常見于 TEL 的刻蝕、CVD、清洗、涂膠顯影、晶圓搬運等高端設(shè)備中。
一、基本信息
產(chǎn)品型號: E244-00048-21
產(chǎn)品名稱: 單板計算機(SBC)
制造商: Tokyo Electron Ltd.(TEL)
類別: 控制主板 / 工業(yè)嵌入式計算平臺
應用位置: TEL E244 控制架構(gòu)中的核心CPU板卡
二、主要功能
中央處理功能(CPU)
運行TEL專用操作系統(tǒng)或嵌入式控制軟件(如VxWorks或Linux變種);
處理所有來自工藝模塊、傳感器模塊、執(zhí)行機構(gòu)的指令及數(shù)據(jù)。
I/O 信號管理
管理來自輸入輸出模塊(如 I/O 控制卡、采集卡)的數(shù)據(jù)信號;
執(zhí)行反饋控制邏輯、聯(lián)鎖判斷及流程切換。
通信與接口協(xié)調(diào)
提供與現(xiàn)場總線、背板總線、Ethernet、RS232/RS485、CAN 等通信接口;
與外圍模塊(如BX81、E249、DAQ模塊)進行高速數(shù)據(jù)通信。
數(shù)據(jù)處理與日志記錄
實時處理設(shè)備運行數(shù)據(jù)、報警信息和參數(shù)日志,提供過程追蹤和回溯支持;
連接人機界面(HMI)實現(xiàn)監(jiān)視控制。
工藝控制與流程調(diào)度
控制如氣路、溫控、搬運動作、門閥等子系統(tǒng)的協(xié)同執(zhí)行;
實現(xiàn)多任務(wù)流程管理與工藝段切換。
英文資料:
TEL Tokyo Electron E244-00048-21 Single Board Computer (SBC) is one of the core processing units in the Tokyo Electron semiconductor equipment control system, mainly responsible for executing process control logic, communication management, human-machine interface (HMI) processing, and issuing system operation instructions. It is a key component in the E244 series control architecture, commonly used in TEL's etching CVD、 In high-end equipment such as cleaning, coating and developing, and wafer handling.
1、 Basic Information
Product model: E244-00048-21
Product Name: Single Board Computer (SBC)
Manufacturer: Tokyo Electron Ltd. (TEL)
Category: Control Motherboard/Industrial Embedded Computing Platform
Application location: Core CPU board in TEL E244 control architecture
2、 Main functions
Central Processing Unit (CPU)
Run TEL dedicated operating systems or embedded control software (such as VxWorks or Linux variants);
Process all instructions and data from process modules, sensor modules, and actuators.
I/O signal management
Manage data signals from input/output modules such as I/O control cards and acquisition cards;
Execute feedback control logic, interlock judgment, and process switching.
Communication and interface coordination
Provide communication interfaces with fieldbus, backplane bus, Ethernet, RS232/RS485, CAN, etc;
High speed data communication with peripheral modules such as BX81, E249, DAQ module.
Data processing and logging
Real time processing of equipment operation data, alarm information, and parameter logs, providing process tracking and backtracking support;
Connect the human-machine interface (HMI) to achieve monitoring and control.
Process Control and Scheduling
Control the collaborative execution of subsystems such as air circuit, temperature control, handling actions, door valves, etc;
Implement multi task process management and process segment switching.
2.產(chǎn) 品 展 示
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