Tokyo Electron 1B80-002815-11采集卡 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1B80-002815-11 采集卡（Data Acquisition Card, DAQ） 是一款用于半導(dǎo)體制造設(shè)備中的高精度信號(hào)采集模塊，主要負(fù)責(zé)從設(shè)備傳感器、監(jiān)測(cè)單元等部分采集模擬量或數(shù)字量信號(hào)，并傳輸至中央控制系統(tǒng)進(jìn)行處理和控制決策。它廣泛應(yīng)用于 Tokyo Electron 的刻蝕、CVD、清洗、輸送等關(guān)鍵工藝設(shè)備中。
以下為該模塊的詳細(xì)功能與產(chǎn)品應(yīng)用領(lǐng)域分析（不含圖案）：
一、基本信息
產(chǎn)品型號(hào)： 1B80-002815-11
產(chǎn)品名稱： 采集卡（Data Acquisition Card）
制造商： Tokyo Electron Ltd.（TEL）
模塊類型： 信號(hào)采集與轉(zhuǎn)換模塊（模擬/數(shù)字輸入）
二、核心功能
傳感器信號(hào)采集
從設(shè)備上的壓力傳感器、溫度探頭、流量計(jì)、電流/電壓監(jiān)測(cè)器等輸入端采集實(shí)時(shí)工藝參數(shù)；
支持多通道模擬輸入（AI）和數(shù)字輸入（DI），具備一定的分辨率和采樣頻率。
模擬-數(shù)字轉(zhuǎn)換（ADC）
對(duì)模擬信號(hào)進(jìn)行A/D轉(zhuǎn)換，使其可供中央控制系統(tǒng)（如 E244 控制器）讀取與判斷；
支持精度較高的12位或16位ADC（依據(jù)TEL模塊設(shè)計(jì)標(biāo)準(zhǔn)）。
狀態(tài)反饋與報(bào)警聯(lián)動(dòng)
實(shí)時(shí)檢測(cè)工藝狀態(tài)變化（如溫度超限、真空泄露、電流異常），并觸發(fā)報(bào)警或保護(hù)機(jī)制；
參與系統(tǒng)的故障自診斷與閉環(huán)控制邏輯。
與主控模塊通訊
通過(guò)TEL專用總線或工業(yè)標(biāo)準(zhǔn)總線（如RS-485、TTL）與主控板、I/O模塊等其他部件通信；
將采集的數(shù)據(jù)上傳至上位系統(tǒng)，供實(shí)時(shí)監(jiān)控或工藝調(diào)整。
英文資料：
TEL Tokyo Electron 1B80-002815-11 Data Acquisition Card (DAQ) is a high-precision signal acquisition module used in semiconductor manufacturing equipment. It is mainly responsible for collecting analog or digital signals from equipment sensors, monitoring units, and other parts, and transmitting them to the central control system for processing and control decision-making. It is widely used in the etching process of Tokyo Electron CVD、 In key process equipment such as cleaning and conveying.
The following is a detailed analysis of the module's functions and product application areas (excluding patterns):
1、 Basic Information
Product model: 1B80-002815-11
Product Name: Data Acquisition Card
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Signal acquisition and conversion module (analog/digital input)
2、 Core functions
Sensor signal acquisition
Real time process parameters are collected from input terminals such as pressure sensors, temperature probes, flow meters, and current/voltage monitors on the equipment;
Supports multi-channel analog input (AI) and digital input (DI), with a certain resolution and sampling frequency.
Analog to Digital Conversion (ADC)
Perform A/D conversion on analog signals to enable them to be read and judged by central control systems (such as E244 controllers);
Supports high-precision 12 bit or 16 bit ADCs (according to TEL module design standards).
Status feedback and alarm linkage
Real time detection of changes in process status (such as temperature exceeding limits, vacuum leakage, abnormal current), and triggering of alarms or protection mechanisms;
Participate in the system's fault self diagnosis and closed-loop control logic.
Communicate with the main control module
Communicate with other components such as the main control board and I/O modules through TEL dedicated bus or industrial standard bus (such as RS-485, TTL);
Upload the collected data to the upper system for real-time monitoring or process adjustment.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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