Tokyo Electron MPC-T0048A-11輸入輸出模塊 PDF資料
1.產 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron MPC-T0048A-11 輸入輸出模塊 是一款用于 Tokyo Electron 半導體制造設備中的 I/O（Input/Output）控制組件，廣泛用于各種自動化工藝流程的信號采集與設備聯(lián)動控制。以下是不含圖案的詳細說明：
一、基本信息
產品型號： MPC-T0048A-11
產品名稱： 輸入輸出模塊（I/O Module）
制造商： Tokyo Electron Ltd.（TEL）
功能類別： 數(shù)字量/模擬量輸入輸出接口板
二、主要功能
信號采集與控制
采集外部設備（傳感器、限位開關、光電器件等）的輸入信號；
輸出控制指令信號至執(zhí)行器（電磁閥、繼電器、伺服驅動等）。
設備聯(lián)動協(xié)調
作為工藝設備中多個子系統(tǒng)（如氣體、真空、運動平臺、溫控系統(tǒng)等）之間的接口橋梁；
控制各環(huán)節(jié)的啟停、順序邏輯、狀態(tài)反饋，確保流程同步執(zhí)行。
現(xiàn)場總線或背板通信接口
通過 TEL 專用總線協(xié)議或工業(yè)標準通信方式（如CAN、RS-485、TTL等）與主控制器（如E244系列）通信；
接口信號標準支持多種電平：24V/TTL/OC 等。
安全與狀態(tài)監(jiān)控
配合系統(tǒng)進行故障檢測、緊急停機聯(lián)動、安全互鎖等控制邏輯；
可配置為冗余回路或自動復位控制回路，提高設備安全性與可靠性。
英文資料：
The TEL Tokyo Electron MPC-T0048A-11 input/output module is an I/O (Input/Output) control component used in Tokyo Electron semiconductor manufacturing equipment, widely used for signal acquisition and equipment linkage control in various automated process flows. The following is a detailed explanation without patterns:
1、 Basic Information
Product model: MPC-T0048A-11
Product Name: I/O Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Function category: Digital/Analog Input/Output Interface Board
2、 Main functions
Signal acquisition and control
Collect input signals from external devices such as sensors, limit switches, optoelectronic devices, etc;
Output control command signals to actuators (solenoid valves, relays, servo drives, etc.).
Equipment linkage coordination
As an interface bridge between multiple subsystems in process equipment, such as gas, vacuum, motion platform, temperature control system, etc;
Control the start stop, sequential logic, and status feedback of each link to ensure synchronous execution of the process.
Fieldbus or Backplane Communication Interface
Communicate with the main controller (such as E244 series) through TEL dedicated bus protocol or industrial standard communication methods (such as CAN, RS-485, TTL, etc.);
The interface signal standard supports multiple levels: 24V/TTL/OC, etc.
Security and status monitoring
Cooperate with the system for fault detection, emergency shutdown linkage, safety interlock and other control logic;
Can be configured as a redundant circuit or an automatic reset control circuit to improve equipment safety and reliability.
2.產 品 展 示
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