Tokyo Electron 1B80-002787-11印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 1B80-002787-11 印刷電路板(Printed Circuit Board,PCB) 是 Tokyo Electron 半導(dǎo)體設(shè)備中用于系統(tǒng)控制或信號管理的關(guān)鍵模塊之一。以下是對其產(chǎn)品功能與應(yīng)用領(lǐng)域的詳細分析(無圖案說明):
一、基本信息
產(chǎn)品型號: 1B80-002787-11
產(chǎn)品名稱: 印刷電路板(PCB)
制造商: Tokyo Electron Ltd.(TEL)
應(yīng)用分類: 信號處理板 / 接口控制板 / 設(shè)備內(nèi)部通信板(依據(jù)實際設(shè)備配置)
二、產(chǎn)品功能概述
內(nèi)部電信號傳輸與分配
作為設(shè)備各功能模塊間的橋梁,負責信號采集、調(diào)度與分發(fā),保障系統(tǒng)邏輯正確運行。
提供穩(wěn)定的信號路徑,避免干擾,確保通信質(zhì)量。
接口連接與數(shù)據(jù)通路
實現(xiàn)與上位主控板、傳感器、驅(qū)動板等組件的連接;
可能包括數(shù)字/模擬信號輸入輸出、通訊接口(如RS-232、TTL等)。
元器件集成與功能邏輯執(zhí)行
板上可能集成電源穩(wěn)壓芯片、邏輯門陣列、緩沖芯片、電感電容等,用于實現(xiàn)具體的電子控制功能或電氣保護。
三、典型應(yīng)用領(lǐng)域
該型號 PCB 多用于 Tokyo Electron 以下設(shè)備類型中:
等離子刻蝕設(shè)備(Etcher)
實現(xiàn)射頻匹配、真空控制等功能所需的信號連接或輔助控制邏輯。
CVD / ALD 化學氣相沉積設(shè)備
在沉積過程控制(如溫度、氣體通斷、反應(yīng)周期)中進行信號控制與反饋傳輸。
光刻設(shè)備輔助系統(tǒng)
控制曝光模塊與對準系統(tǒng)的信號通信,或參與圖像處理模塊的接口處理。
清洗設(shè)備 / 輸送機械系統(tǒng)
控制載片機構(gòu)(wafer transfer)、夾具操作、氣動元件等。
英文資料:
TEL Tokyo Electron 1B80-002787-11 Printed Circuit Board (PCB) is one of the key modules used for system control or signal management in Tokyo Electron semiconductor equipment. The following is a detailed analysis of its product functions and application areas (without graphic explanation):
1、 Basic Information
Product model: 1B80-002787-11
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Ltd. (TEL)
Application classification: Signal processing board/Interface control board/Device internal communication board (based on actual device configuration)
2、 Product Function Overview
Internal transmission and distribution of electrical signals
As a bridge between various functional modules of the device, responsible for signal acquisition, scheduling, and distribution, ensuring the correct operation of system logic.
Provide a stable signal path, avoid interference, and ensure communication quality.
Interface connection and data path
Connect with components such as the upper control board, sensors, and driver board;
This may include digital/analog signal input/output, communication interfaces (such as RS-232, TTL, etc.).
Component integration and functional logic execution
The board may integrate power regulator chips, logic gate arrays, buffer chips, inductors and capacitors, etc., to achieve specific electronic control functions or electrical protection.
3、 Typical application areas
This PCB model is commonly used in the following equipment types of Tokyo Electron:
Plasma etching equipment (Etcher)
The signal connection or auxiliary control logic required to achieve functions such as RF matching and vacuum control.
CVD/ALD chemical vapor deposition equipment
Signal control and feedback transmission are carried out in sedimentation process control (such as temperature, gas on/off, reaction cycle).
Lithography equipment auxiliary system
Control the signal communication between the exposure module and the alignment system, or participate in the interface processing of the image processing module.
Cleaning equipment/conveying machinery system
Control wafer transfer, fixture operation, pneumatic components, etc.
2.產(chǎn) 品 展 示
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