Tokyo Electron 408-500111-3自動(dòng)裝載機(jī)板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 408-500111-3 自動(dòng)裝載機(jī)板 是東京電子（TEL）半導(dǎo)體制造設(shè)備中用于控制晶圓自動(dòng)裝載/卸載裝置的專用控制電路板。該板卡通常安裝于前端裝載系統(tǒng)（Front-End Module, FEM）或自動(dòng)化搬運(yùn)系統(tǒng)中，實(shí)現(xiàn)晶圓盒（FOUP/SMIF）與工藝艙室之間的高精度傳送。
一、產(chǎn)品概述
| 項(xiàng)目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 自動(dòng)裝載機(jī)板（Auto Loader Board） |
| 產(chǎn)品型號(hào) | 408-500111-3 |
| 制造廠商 | Tokyo Electron Ltd.（東京電子） |
| 安裝位置 | 晶圓自動(dòng)搬運(yùn)系統(tǒng)/前端模塊控制單元內(nèi)部 |
| 功能定位 | 晶圓裝載與卸載機(jī)構(gòu)的控制與狀態(tài)管理 |
二、核心功能
自動(dòng)裝載控制
控制機(jī)械臂、升降平臺(tái)、真空吸附系統(tǒng)等完成晶圓自動(dòng)裝載動(dòng)作；
管理晶圓盒對(duì)接、艙門開啟/關(guān)閉、Wafer對(duì)準(zhǔn)等精細(xì)動(dòng)作。
動(dòng)作信號(hào)輸出與反饋采集
輸出多路驅(qū)動(dòng)信號(hào)，驅(qū)動(dòng)步進(jìn)電機(jī)或伺服系統(tǒng)執(zhí)行搬運(yùn)動(dòng)作；
采集傳感器反饋，如位置傳感器、對(duì)位傳感器、門禁狀態(tài)等。
狀態(tài)監(jiān)測(cè)與異常處理
實(shí)時(shí)監(jiān)控自動(dòng)裝載系統(tǒng)工作狀態(tài)，支持中斷、報(bào)警與自診斷功能；
保障晶圓搬運(yùn)過(guò)程的可靠性與安全性。
三、典型應(yīng)用領(lǐng)域
TEL 涂膠顯影機(jī)（Coater/Developer）：自動(dòng)裝載晶圓至旋涂/顯影腔體；
蝕刻設(shè)備（Etcher）、清洗設(shè)備（Cleaner）：控制晶圓從前端到腔體的精密轉(zhuǎn)移；
前端模塊（FEM） 與 中控系統(tǒng) 的連接橋梁。
英文資料：
The TEL Tokyo Electron 408-500111-3 automatic loader board is a dedicated control circuit board used in the semiconductor manufacturing equipment of Tokyo Electronics (TEL) to control the automatic wafer loading/unloading device. This board is usually installed in the Front End Module (FEM) or automated handling system to achieve high-precision transfer between the wafer box (FOUP/SMIF) and the process compartment.
1、 Product Overview
Project Content
Product Name: Auto Loader Board
Product model 408-500111-3
Manufacturer Tokyo Electron Ltd
Installation location: Inside the wafer automatic handling system/front-end module control unit
Control and status management of functional positioning wafer loading and unloading mechanism
2、 Core functions
Automatic loading control
Control the robotic arm, lifting platform, vacuum adsorption system, etc. to complete the automatic wafer loading action;
Manage precise actions such as docking of crystal round boxes, opening/closing of cabin doors, and alignment of wafers.
Action signal output and feedback acquisition
Output multiple drive signals to drive stepper motors or servo systems to perform handling actions;
Collect sensor feedback, such as position sensors, alignment sensors, access control status, etc.
Status monitoring and exception handling
Real time monitoring of the working status of the automatic loading system, supporting interrupt, alarm, and self diagnostic functions;
Ensure the reliability and safety of the wafer handling process.
3、 Typical application areas
TEL Coater/Developer: Automatically loads wafers into spin coating/development chambers;
Etcher and Cleaner: Control the precise transfer of wafers from the front end to the cavity;
The connection bridge between the front-end module (FEM) and the central control system.
2.產(chǎn) 品 展 示
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| R46GENA-TS-NS-NV-00 | R43HEAA-R2-NS-VS-02 | R33GEN0-R2-NS-NV-00 |
| R46GENA-TS-NG-NV-00 | R24HENA-HS-LB-NV-02 | R43HEBA-R2-NS-VS-00 |
| R46GENA-TS-LS-NV-02 | SERVOSTAR-603-AS | IMDSO14 |
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