Tokyo Electron 1981-600512-13分區(qū)監(jiān)控板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1981-600512-13 分區(qū)監(jiān)控板 是東京電子（TEL）半導(dǎo)體設(shè)備中用于對(duì)設(shè)備各個(gè)功能區(qū)域或工藝區(qū)域進(jìn)行狀態(tài)監(jiān)控和管理的專用電子板，主要負(fù)責(zé)采集分區(qū)內(nèi)傳感器數(shù)據(jù)、監(jiān)測(cè)設(shè)備運(yùn)行狀況，并向主控系統(tǒng)反饋實(shí)時(shí)信息。
一、產(chǎn)品概述
| 項(xiàng)目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 分區(qū)監(jiān)控板（Zone Monitoring Board） |
| 產(chǎn)品型號(hào) | 1981-600512-13 |
| 制造廠商 | Tokyo Electron Ltd.（東京電子） |
| 功能定位 | 區(qū)域狀態(tài)監(jiān)測(cè)與信號(hào)采集 |
二、核心功能
分區(qū)狀態(tài)采集
負(fù)責(zé)采集設(shè)備指定分區(qū)內(nèi)的溫度、壓力、流量、開關(guān)量等傳感器信號(hào)；
實(shí)時(shí)監(jiān)控該分區(qū)的工藝和設(shè)備運(yùn)行狀態(tài)。
信號(hào)處理與反饋
將采集到的模擬及數(shù)字信號(hào)處理后，轉(zhuǎn)換成主控系統(tǒng)可識(shí)別的標(biāo)準(zhǔn)格式；
監(jiān)測(cè)異常狀態(tài)并可發(fā)出報(bào)警信號(hào)。
與主控系統(tǒng)通信
通過通信總線將分區(qū)信息傳遞至中央控制模塊，支持集中監(jiān)控與遠(yuǎn)程管理。
英文資料：
The TEL Tokyo Electron 1981-600512-13 partition monitoring board is a specialized electronic board used in Tokyo Electronics (TEL) semiconductor equipment to monitor and manage the status of various functional or process areas of the equipment. It is mainly responsible for collecting sensor data within the partition, monitoring the operation status of the equipment, and providing real-time information feedback to the main control system.
1、 Product Overview
Project Content
Product Name: Zone Monitoring Board
Product model 1981-600512-13
Manufacturer Tokyo Electron Ltd
Functional positioning area status monitoring and signal acquisition
2、 Core functions
Partition status collection
Responsible for collecting sensor signals such as temperature, pressure, flow rate, and switch quantity within the designated partition of the equipment;
Real time monitoring of the process and equipment operation status of the partition.
Signal Processing and Feedback
After processing the collected analog and digital signals, convert them into a standard format recognizable by the main control system;
Monitor abnormal states and issue alarm signals.
Communicate with the main control system
The partition information is transmitted to the central control module through the communication bus, supporting centralized monitoring and remote management.
2.產(chǎn) 品 展 示
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