Tokyo Electron 1D81-000381-16模擬輸入電子模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1D81-000381-16 模擬輸入電子模塊 是一款用于東京電子（TEL）半導(dǎo)體設(shè)備中的高精度模擬信號(hào)采集單元，主要功能是接收來(lái)自各類模擬傳感器（如溫度、壓力、流量、電壓/電流信號(hào)等）的輸入數(shù)據(jù)，并將其轉(zhuǎn)換為可供控制系統(tǒng)處理的標(biāo)準(zhǔn)電信號(hào)。該模塊是TEL設(shè)備實(shí)現(xiàn)高穩(wěn)定性、高精度工藝控制的關(guān)鍵電子部件之一。
一、產(chǎn)品概述
| 項(xiàng)目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 模擬輸入電子模塊（Analog Input Module） |
| 產(chǎn)品型號(hào) | 1D81-000381-16 |
| 制造廠商 | Tokyo Electron Ltd.（東京電子） |
| 應(yīng)用類別 | 數(shù)據(jù)采集與信號(hào)接口模塊 |
二、核心功能
模擬信號(hào)采集
支持多通道模擬輸入，通常用于讀取溫度傳感器（如熱電偶、RTD）、壓力傳感器、流量計(jì)等設(shè)備信號(hào)；
可采集電壓（如 0–10V）、電流（如 4–20mA）等工業(yè)標(biāo)準(zhǔn)信號(hào)。
A/D轉(zhuǎn)換與標(biāo)準(zhǔn)化輸出
內(nèi)部集成高精度模數(shù)轉(zhuǎn)換器（ADC），將模擬量實(shí)時(shí)轉(zhuǎn)換為數(shù)字信號(hào)；
轉(zhuǎn)換后的數(shù)據(jù)可直接供主控系統(tǒng)讀取，實(shí)現(xiàn)實(shí)時(shí)監(jiān)控與控制。
系統(tǒng)集成與反饋
采集的數(shù)據(jù)可作為閉環(huán)控制系統(tǒng)的反饋輸入，輔助實(shí)現(xiàn) PID 控制、報(bào)警判斷等功能；
與TEL主控板（CPU模塊、邏輯處理模塊等）進(jìn)行通信，構(gòu)建完整數(shù)據(jù)鏈路。
三、典型應(yīng)用場(chǎng)景
溫控系統(tǒng)
采集晶圓加熱臺(tái)、腔體壁面、流體輸送路徑等溫區(qū)的實(shí)時(shí)溫度數(shù)據(jù)。
壓力/氣體流量監(jiān)測(cè)
接入壓力變送器、流量計(jì)等傳感器，監(jiān)測(cè)工藝腔體、氣體通道的運(yùn)行狀態(tài)。
工藝設(shè)備狀態(tài)檢測(cè)
檢測(cè)清洗液液位、電源輸出電壓、化學(xué)氣體濃度等關(guān)鍵工藝參數(shù)。
英文資料：
TEL Tokyo Electron 1D81-0000381-16 Analog Input Electronic Module is a high-precision analog signal acquisition unit used in Tokyo Electronics (TEL) semiconductor equipment. Its main function is to receive input data from various analog sensors (such as temperature, pressure, flow, voltage/current signals, etc.) and convert it into standard electrical signals that can be processed by the control system. This module is one of the key electronic components for TEL devices to achieve high stability and precision process control.
1、 Product Overview
Project Content
Product Name Analog Input Module
Product Model 1D81-000381-16
Manufacturer Tokyo Electron Ltd
Application category data acquisition and signal interface module
2、 Core functions
Analog signal acquisition
Supports multi-channel analog input, usually used to read signals from temperature sensors (such as thermocouples, RTDs), pressure sensors, flow meters, and other devices;
It can collect industrial standard signals such as voltage (e.g. 0-10V) and current (e.g. 4-20mA).
A/D conversion and standardized output
Internally integrated high-precision analog-to-digital converter (ADC), which converts analog signals into digital signals in real-time;
The converted data can be directly read by the main control system to achieve real-time monitoring and control.
System integration and feedback
The collected data can be used as feedback input for closed-loop control systems, assisting in PID control, alarm judgment, and other functions;
Communicate with the TEL main control board (CPU module, logic processing module, etc.) to establish a complete data link.
3、 Typical application scenarios
temperature control
Collect real-time temperature data of the wafer heating stage, chamber wall, and isothermal zone of the fluid transport path.
Pressure/gas flow monitoring
Connect pressure transmitters, flow meters, and other sensors to monitor the operating status of process chambers and gas channels.
Process equipment status detection
Detect key process parameters such as cleaning solution level, power output voltage, and chemical gas concentration.
2.產(chǎn) 品 展 示
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