Tokyo Electron 2939-000009-12直流電源供應模塊 PDF資料
1.產 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 2939-000009-12 直流電源供應模塊 是一款用于東京電子(TEL)半導體設備中的專用電源模塊,主要功能是為控制系統(tǒng)、傳感器、執(zhí)行部件等子系統(tǒng)提供穩(wěn)定可靠的直流(DC)電源,是整機運行中的基礎能源保障部件之一。
一、產品概述
項目 | 內容 |
---|---|
產品名稱 | 直流電源供應模塊(DC Power Supply Module) |
產品型號 | 2939-000009-12 |
制造商 | Tokyo Electron Ltd.(東京電子) |
功能定位 | 提供設備內部的直流穩(wěn)壓電源 |
二、主要功能
穩(wěn)壓直流輸出
將輸入電源(AC 或 DC)轉換為設備所需的特定直流電壓,如 +24V、+12V 或 +5V;
具備穩(wěn)壓輸出特性,確保電壓波動對設備影響最小化。
多通道供電
可能具備多個獨立的輸出通道,分別供給不同模塊使用;
每個通道可帶有過流保護和短路保護。
安全與隔離功能
內建電氣隔離模塊,防止電氣干擾傳遞至控制系統(tǒng);
支持過壓、過溫、短路保護,提高運行安全性。
三、應用領域
半導體制造設備電源系統(tǒng)
廣泛應用于TEL的涂膠顯影機、蝕刻機、清洗設備等自動化平臺,作為系統(tǒng)供電核心模塊。
控制系統(tǒng)與驅動器供電
為PLC控制器、I/O模塊、電磁閥驅動器、傳感器等提供穩(wěn)定直流電源。
高潔凈環(huán)境供電保障
特別適用于對電源穩(wěn)定性要求極高的潔凈室設備應用場景。
英文資料:
The TEL Tokyo Electron 2939-000009-12 DC power supply module is a specialized power module used in Tokyo Electronics (TEL) semiconductor equipment. Its main function is to provide stable and reliable DC power to subsystems such as control systems, sensors, and execution components. It is one of the basic energy protection components during the operation of the entire machine.
1、 Product Overview
Project Content
Product Name: DC Power Supply Module
Product model 2939-000009-12
Manufacturer Tokyo Electron Ltd
Functional positioning provides a DC stabilized power supply inside the device
2、 Main functions
Stabilized DC output
Convert input power (AC or DC) to a specific DC voltage required by the device, such as+24V,+12V, or+5V;
Having stable output characteristics to ensure minimal impact of voltage fluctuations on equipment.
Multi channel power supply
May have multiple independent output channels, each supplying different modules for use;
Each channel can be equipped with overcurrent protection and short-circuit protection.
Safety and isolation functions
Built in electrical isolation module to prevent electrical interference from being transmitted to the control system;
Support overvoltage, overheating, and short circuit protection to improve operational safety.
3、 Application Fields
Power supply system for semiconductor manufacturing equipment
Widely used in TEL's coating and developing machines, etching machines, cleaning equipment and other automation platforms as the core module for system power supply.
Control system and driver power supply
Provide stable DC power supply for PLC controllers, I/O modules, solenoid valve drivers, sensors, etc.
High cleanliness and clean environment power supply guarantee
Especially suitable for clean room equipment application scenarios that require extremely high power stability.
2.產 品 展 示
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