Tokyo Electron 2L80-004910-31溫度控制器 PDF資料
1.產 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2L80-004910-31 溫度控制器 是一款專為東京電子（TEL）半導體制造設備設計的高精度溫控模塊，主要用于對工藝過程中的關鍵溫區(qū)進行實時監(jiān)控與閉環(huán)控制，確保溫度穩(wěn)定在預設范圍內，以滿足嚴格的半導體工藝要求。
一、產品概述
| 項目 | 內容 |
|---|---|
| 產品名稱 | 溫度控制器（Temperature Controller） |
| 產品型號 | 2L80-004910-31 |
| 制造商 | Tokyo Electron Ltd.（東京電子） |
| 應用類型 | 精密溫度控制模塊 |
二、核心功能
多通道溫度監(jiān)控
實時讀取熱電偶、熱敏電阻或紅外傳感器的反饋信號；
支持多個溫區(qū)獨立測溫和控制，如腔體壁、基板臺、氣路管道等。
閉環(huán)溫控調節(jié)
具備PID控制算法，根據(jù)設定值與實際值偏差自動調整加熱功率或冷卻氣流；
可實現(xiàn)精度±0.1°C或更高的控溫精度（視應用而定）。
報警與聯(lián)動保護
超溫、開路、短路等異常情況可觸發(fā)報警并自動斷開輸出；
與主控系統(tǒng)聯(lián)動，保證設備運行安全。
三、應用場景
晶圓加熱臺溫控
用于涂膠顯影設備、清洗機、等離子蝕刻機等的加熱平臺或烘烤站控制。
真空腔體溫度調節(jié)
控制腔體壁面溫度，防止冷凝或影響真空工藝環(huán)境穩(wěn)定性。
氣路/化學液體溫控
保持氣體或化學液在傳輸過程中的溫度穩(wěn)定，確保工藝一致性。
英文資料：
The TEL Tokyo Electron 2L80-004910-31 temperature controller is a high-precision temperature control module designed specifically for Tokyo Electronics (TEL) semiconductor manufacturing equipment. It is mainly used for real-time monitoring and closed-loop control of key temperature zones during the process, ensuring that the temperature remains stable within the preset range to meet strict semiconductor process requirements.
1、 Product Overview
Project Content
Product Name: Temperature Controller
Product model 2L80-004910-31
Manufacturer Tokyo Electron Ltd
Application type: Precision temperature control module
2、 Core functions
Multi channel temperature monitoring
Real time reading of feedback signals from thermocouples, thermistors, or infrared sensors;
Support independent temperature measurement and control of multiple temperature zones, such as chamber walls, substrate platforms, gas pipelines, etc.
Closed loop temperature control regulation
Equipped with PID control algorithm, automatically adjust heating power or cooling airflow based on the deviation between the set value and the actual value;
It can achieve temperature control accuracy of ± 0.1 ° C or higher (depending on the application).
Alarm and linkage protection
Abnormal conditions such as overheating, open circuit, and short circuit can trigger an alarm and automatically disconnect the output;
Integrate with the main control system to ensure the safe operation of the equipment.
3、 Application scenarios
Temperature control of wafer heating table
Used for controlling heating platforms or baking stations in coating and developing equipment, cleaning machines, plasma etching machines, etc.
Vacuum chamber temperature regulation
Control the temperature of the chamber wall to prevent condensation or affect the stability of the vacuum process environment.
Gas path/chemical liquid temperature control
Maintain temperature stability of gases or chemical liquids during transportation to ensure process consistency.
2.產 品 展 示
3.其他產品
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